Inventor · disambiguated record
Hirotaka Kohno
Also filed as: KOHNO HIROTAKA
12 granted patents·6 pending applications·23 citations·filing 2004–2019
87Inventor score
Top patents by PatentIndex Score
18 records- 0185US9019467B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Apr 28, 2015·2 cites·35 claims
- 0282US10338480B2Lithography system, simulation apparatus, and pattern forming methodNIKON CORP·Filed 2015·Granted Jul 2, 2019·2 cites·52 claims
- 0381US9746781B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2014·Granted Aug 29, 2017·2 cites·54 claims
- 0481US7982857B2Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portionNIKON CORP·Filed 2004·Granted Jul 19, 2011·15 cites·23 claims
- 0578US9798245B2Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and memberNISHII YASUFUMI·Filed 2010·Granted Oct 24, 2017·2 cites·32 claims
- 0665US9268237B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Feb 23, 2016·0 cites·26 claims
- 0764US9846371B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIPPON KOGAKU KK·Filed 2015·Granted Dec 19, 2017·0 cites·17 claims
- 0863US10846457B2Lithography system, simulation apparatus, and pattern forming methodNIKON CORP·Filed 2019·Granted Nov 24, 2020·0 cites·48 claims
- 0962US2017329234A1Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2017·Application pending·0 cites
- 1061US8384880B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Granted Feb 26, 2013·0 cites·17 claims
- 1161US8208117B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2008·Granted Jun 26, 2012·0 cites·8 claims
- 1258US2018004096A1Stage apparatus, exposure apparatus, and exposure methodNIPPON KOGAKU KK·Filed 2017·Application pending·0 cites
- 1358US2017329239A1Exposure apparatus and method for producing deviceNIKON CORP·Filed 2017·Application pending·0 cites
- 1455US9599907B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2013·Granted Mar 21, 2017·0 cites·36 claims
- 1553US2006227312A1Exposure method, substrate stage, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 1651US2009262316A1Exposure apparatus and method for producing deviceNIKON CORP·Filed 2006·Application pending·0 cites
- 1749US8488099B2Exposure apparatus and device manufacturing methodNAGASAKA HIROYUKI·Filed 2005·Granted Jul 16, 2013·0 cites·27 claims
- 1844US2008137047A1Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →