Assignee
OWA SOICHI
JP·11 granted patents·73 citations·filing 2005–2012
Top patents by PatentIndex Score
11 records- 0196US8792081B2Controller for optical device, exposure method and apparatus, and method for manufacturing deviceOWA SOICHI·Filed 2008·Granted Jul 29, 2014·19 cites·34 claims
- 0295US8089616B2Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and deviceOWA SOICHI·Filed 2009·Granted Jan 3, 2012·17 cites·28 claims
- 0390US9291814B2Spatial light modulator, exposure apparatus, and method for manufacturing deviceOWA SOICHI·Filed 2011·Granted Mar 22, 2016·9 cites·34 claims
- 0483US9310520B2Optical material, optical element, and method for manufacturing sameOWA SOICHI·Filed 2011·Granted Apr 12, 2016·6 cites·40 claims
- 0583US9239525B2Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and deviceOWA SOICHI·Filed 2011·Granted Jan 19, 2016·3 cites·29 claims
- 0683US8094290B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2008·Granted Jan 10, 2012·12 cites·20 claims
- 0776US8807978B2Template manufacturing method, template inspecting method and inspecting apparatus, nanoimprint apparatus, nanoimprint system, and device manufacturing methodOWA SOICHI·Filed 2010·Granted Aug 19, 2014·3 cites·13 claims
- 0876US8169591B2Exposure apparatus, exposure method, and method for producing deviceOWA SOICHI·Filed 2005·Granted May 1, 2012·4 cites·38 claims
- 0961US8208117B2Exposure method, substrate stage, exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2008·Granted Jun 26, 2012·0 cites·8 claims
- 1053US9063436B2Exposure apparatus, exposure method, and method for producing deviceOWA SOICHI·Filed 2012·Granted Jun 23, 2015·0 cites·19 claims
- 1141US8570632B2Microactuator, optical device and exposure apparatus, and device manufacturing methodOWA SOICHI·Filed 2011·Granted Oct 29, 2013·0 cites·15 claims
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