Inventor · disambiguated record
Richard O. Collins
Also filed as: COLLINS RICHARD · COLLINS RICHARD O · COLLINS RICHARD OMAR
20 granted patents·16 pending applications·123 citations·filing 2002–2025
93Inventor score
Files withAPPLIED MATERIALS INC31COLLINS RICHARD O2PATALAY KAILASH KIRAN1RONSSE BOBBY M1SANCHEZ ERROL ANTONIO C1
Top patents by PatentIndex Score
36 records- 0196US11784076B2Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2022·Granted Oct 10, 2023·2 cites·24 claims
- 0294US8398777B2System and method for pedestal adjustmentCOLLINS RICHARD O·Filed 2008·Granted Mar 19, 2013·45 cites·7 claims
- 0391US8441640B2Non-contact substrate support position sensing system and corresponding adjustmentsPATALAY KAILASH KIRAN·Filed 2008·Granted May 14, 2013·19 cites·20 claims
- 0490US10755955B2Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2018·Granted Aug 25, 2020·4 cites·20 claims
- 0586US2025354250A1Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0684US11424149B2Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2020·Granted Aug 23, 2022·1 cites·20 claims
- 0783US11171023B2Diode laser for wafer heating for EPI processesAPPLIED MATERIALS INC·Filed 2016·Granted Nov 9, 2021·4 cites·20 claims
- 0881US12371776B2Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
- 0980US10269614B2Susceptor design to reduce edge thermal peakAPPLIED MATERIALS INC·Filed 2015·Granted Apr 23, 2019·3 cites·15 claims
- 1080US2023420279A1Substrate transfer mechanism to reduce back-side substrate contactAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1176US2025101629A1Multi-layer epi chamber bodyAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1273US2024318351A1Multi-thermal cvd chambers with shared gas delivery and exhaust systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1373US2025275015A1Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1472US11781212B2Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·0 cites·16 claims
- 1572US8747560B2System and method for pedestal adjustmentAPPLIED MATERIALS INC·Filed 2013·Granted Jun 10, 2014·2 cites·8 claims
- 1672US8496780B2Apparatus for the deposition of high dielectric constant filmsRONSSE BOBBY M·Filed 2006·Granted Jul 30, 2013·6 cites·17 claims
- 1771USD716240SLower chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Oct 28, 2014·16 cites·1 claims
- 1870US12324061B2Epitaxial deposition chamberAPPLIED MATERIALS INC·Filed 2021·Granted Jun 3, 2025·0 cites·20 claims
- 1969USD711331SUpper chamber linerAPPLIED MATERIALS INC·Filed 2013·Granted Aug 19, 2014·15 cites·1 claims
- 2068US2025285846A1Plasma preclean system for cluster toolAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2164US9297164B2VIP roofing insulationCOLLINS RICHARD O·Filed 2014·Granted Mar 29, 2016·6 cites·19 claims
- 2263US12037701B2Multi-thermal CVD chambers with shared gas delivery and exhaust systemAPPLIED MATERIALS INC·Filed 2021·Granted Jul 16, 2024·0 cites·16 claims
- 2361US12188148B2Multi-layer EPI chamber bodyAPPLIED MATERIALS INC·Filed 2020·Granted Jan 7, 2025·0 cites·20 claims
- 2459US12334318B2Plasma preclean system for cluster toolAPPLIED MATERIALS INC·Filed 2022·Granted Jun 17, 2025·0 cites·12 claims
- 2553US2013220221A1Method and apparatus for precursor deliveryAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2649US10837121B2Susceptor supportAPPLIED MATERIALS INC·Filed 2017·Granted Nov 17, 2020·0 cites·14 claims
- 2748US2013333621A1Apparatus for the deposition of high dielectric constant filmsAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2848US2012270384A1Apparatus for deposition of materials on a substrateSANCHEZ ERROL ANTONIO C·Filed 2011·Application pending·0 cites
- 2945US9613835B2Heating lamp assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·0 cites·14 claims
- 3045US2015162230A1Apparatus for self-centering pre-heat ringAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3144US2010075488A1Cvd reactor with multiple processing levels and dual-axis motorized lift mechanismAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3243US2008072820A1Modular cvd epi 300mm reactorAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3343US2015037019A1Susceptor support shaft and kinematic mountAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3440US2013025538A1Methods and apparatus for deposition processesAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
- 3536US2003101938A1Apparatus for the deposition of high dielectric constant filmsAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 3634US2017175265A1Flat susceptor with grooves for minimizing temperature profile across a substrateAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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