Assignee
APPLIED MATERIALS INC
US·12,606 granted patents·5,350 pending applications·421,201 citations·filing 1974–2025
Top patents by PatentIndex Score
17,956 records- 0199US11745302B2Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing processAPPLIED MATERIALS INC·Filed 2021·Granted Sep 5, 2023·5 cites·20 claims
- 0299US11117265B2Robot for simultaneous substrate transferAPPLIED MATERIALS INC·Filed 2020·Granted Sep 14, 2021·9 cites·19 claims
- 0399US11018003B2Method of selective silicon germanium epitaxy at low temperaturesAPPLIED MATERIALS INC·Filed 2019·Granted May 25, 2021·312 cites·21 claims
- 0499US10747102B2Extreme ultraviolet mask blank with multilayer absorber and method of manufactureAPPLIED MATERIALS INC·Filed 2017·Granted Aug 18, 2020·26 cites·20 claims
- 0599US10679870B2Semiconductor processing chamber multistage mixing apparatusAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·32 cites·19 claims
- 0699US10456886B2Porous chemical mechanical polishing padsAPPLIED MATERIALS INC·Filed 2016·Granted Oct 29, 2019·26 cites·20 claims
- 0799US10400335B2Dual-direction chemical delivery system for ALD/CVD chambersAPPLIED MATERIALS INC·Filed 2017·Granted Sep 3, 2019·363 cites·12 claims
- 0899US10399201B2Advanced polishing pads having compositional gradients by use of an additive manufacturing processAPPLIED MATERIALS INC·Filed 2016·Granted Sep 3, 2019·24 cites·21 claims
- 0999US10391605B2Method and apparatus for forming porous advanced polishing pads using an additive manufacturing processAPPLIED MATERIALS INC·Filed 2016·Granted Aug 27, 2019·19 cites·12 claims
- 1099US10319739B2Accommodating imperfectly aligned memory holesAPPLIED MATERIALS INC·Filed 2018·Granted Jun 11, 2019·68 cites·16 claims
- 1199US10312048B2Creating ion energy distribution functions (IEDF)APPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·48 cites·19 claims
- 1299US10062578B2Methods for etch of metal and metal-oxide filmsAPPLIED MATERIALS INC·Filed 2015·Granted Aug 28, 2018·94 cites·20 claims
- 1399US10062585B2Oxygen compatible plasma sourceAPPLIED MATERIALS INC·Filed 2016·Granted Aug 28, 2018·102 cites·15 claims
- 1499US10049891B1Selective in situ cobalt residue removalAPPLIED MATERIALS INC·Filed 2017·Granted Aug 14, 2018·101 cites·19 claims
- 1599USD825505STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2017·Granted Aug 14, 2018·318 cites·1 claims
- 1699US10029405B2Printing a chemical mechanical polishing padAPPLIED MATERIALS INC·Filed 2017·Granted Jul 24, 2018·24 cites·13 claims
- 1799US9960045B1Charge-trap layer separation and word-line isolation for enhanced 3-D NAND structureAPPLIED MATERIALS INC·Filed 2017·Granted May 1, 2018·113 cites·15 claims
- 1899US9934942B1Chamber with flow-through sourceAPPLIED MATERIALS INC·Filed 2016·Granted Apr 3, 2018·108 cites·19 claims
- 1999US9850573B1Non-line of sight deposition of erbium based plasma resistant ceramic coatingAPPLIED MATERIALS INC·Filed 2016·Granted Dec 26, 2017·347 cites·19 claims
- 2099US9842744B2Methods for etch of SiN filmsAPPLIED MATERIALS INC·Filed 2016·Granted Dec 12, 2017·113 cites·10 claims
- 2199US9837284B2Oxide etch selectivity enhancementAPPLIED MATERIALS INC·Filed 2017·Granted Dec 5, 2017·112 cites·12 claims
- 2299US9773695B2Integrated bit-line airgap formation and gate stack post cleanAPPLIED MATERIALS INC·Filed 2016·Granted Sep 26, 2017·113 cites·15 claims
- 2399USD798248STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2015·Granted Sep 26, 2017·309 cites·1 claims
- 2499US9765432B2Dual-direction chemical delivery system for ALD/CVD chambersAPPLIED MATERIALS INC·Filed 2016·Granted Sep 19, 2017·362 cites·15 claims
- 2599US9754800B2Selective etch for silicon filmsAPPLIED MATERIALS INC·Filed 2016·Granted Sep 5, 2017·110 cites·20 claims
- 2699US9744724B2Apparatus for printing a chemical mechanical polishing padAPPLIED MATERIALS INC·Filed 2016·Granted Aug 29, 2017·42 cites·20 claims
- 2799USD784276SSusceptor assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Apr 18, 2017·333 cites·1 claims
- 2899US9617188B2Rare-earth oxide based coatingAPPLIED MATERIALS INC·Filed 2016·Granted Apr 11, 2017·40 cites·20 claims
- 2999US9613822B2Oxide etch selectivity enhancementAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·128 cites·12 claims
- 3099US9607856B2Selective titanium nitride removalAPPLIED MATERIALS INC·Filed 2015·Granted Mar 28, 2017·126 cites·18 claims
- 3199US9583333B2Low temperature silicon nitride films using remote plasma CVD technologyAPPLIED MATERIALS INC·Filed 2014·Granted Feb 28, 2017·339 cites·12 claims
- 3299US9520303B2Aluminum selective etchAPPLIED MATERIALS INC·Filed 2014·Granted Dec 13, 2016·131 cites·14 claims
- 3399US9478432B2Silicon oxide selective removalAPPLIED MATERIALS INC·Filed 2014·Granted Oct 25, 2016·129 cites·15 claims
- 3499US9457520B2Apparatus for printing a chemical mechanical polishing padAPPLIED MATERIALS INC·Filed 2015·Granted Oct 4, 2016·48 cites·16 claims
- 3599US9449846B2Vertical gate separationAPPLIED MATERIALS INC·Filed 2015·Granted Sep 20, 2016·133 cites·15 claims
- 3699US9418858B2Selective etch of silicon by way of metastable hydrogen terminationAPPLIED MATERIALS INC·Filed 2014·Granted Aug 16, 2016·138 cites·20 claims
- 3799US9396989B2Air gaps between copper linesAPPLIED MATERIALS INC·Filed 2014·Granted Jul 19, 2016·144 cites·15 claims
- 3899US9390937B2Silicon-carbon-nitride selective etchAPPLIED MATERIALS INC·Filed 2013·Granted Jul 12, 2016·132 cites·20 claims
- 3999US9353440B2Dual-direction chemical delivery system for ALD/CVD chambersAPPLIED MATERIALS INC·Filed 2013·Granted May 31, 2016·373 cites·18 claims
- 4099US9343327B2Methods for etch of sin filmsAPPLIED MATERIALS INC·Filed 2015·Granted May 17, 2016·147 cites·16 claims
- 4199US9269590B2Spacer formationAPPLIED MATERIALS INC·Filed 2014·Granted Feb 23, 2016·195 cites·15 claims
- 4299US9219006B2Flowable carbon film by FCVD hardware using remote plasma PECVDAPPLIED MATERIALS INC·Filed 2014·Granted Dec 22, 2015·342 cites·20 claims
- 4399US9212099B2Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramicsAPPLIED MATERIALS INC·Filed 2013·Granted Dec 15, 2015·56 cites·15 claims
- 4499US9190293B2Even tungsten etch for high aspect ratio trenchesAPPLIED MATERIALS INC·Filed 2014·Granted Nov 17, 2015·251 cites·14 claims
- 4599US9165786B1Integrated oxide and nitride recess for better channel contact in 3D architecturesAPPLIED MATERIALS INC·Filed 2014·Granted Oct 20, 2015·184 cites·15 claims
- 4699US9159606B1Metal air gapAPPLIED MATERIALS INC·Filed 2014·Granted Oct 13, 2015·201 cites·15 claims
- 4799US9144147B2Semiconductor processing system and methods using capacitively coupled plasmaAPPLIED MATERIALS INC·Filed 2013·Granted Sep 22, 2015·188 cites·11 claims
- 4899US9136273B1Flash gate air gapAPPLIED MATERIALS INC·Filed 2014·Granted Sep 15, 2015·184 cites·15 claims
- 4999US9090046B2Ceramic coated article and process for applying ceramic coatingAPPLIED MATERIALS INC·Filed 2013·Granted Jul 28, 2015·68 cites·12 claims
- 5099US9093390B2Conformal oxide dry etchAPPLIED MATERIALS INC·Filed 2014·Granted Jul 28, 2015·185 cites·17 claims
Showing the top 50 of 17,956 patent records by PatentIndex Score.
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