USD798248SActiveUtility

Target profile for a physical vapor deposition chamber target

Assignee: APPLIED MATERIALS INCPriority: Jun 18, 2015Filed: Jun 18, 2015Granted: Sep 26, 2017

Est. expiryJun 18, 2035(~8.9 yrs left)· nominal 20-yr term from priority

PatentIndex Score

309

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References

Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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