Assignee
PATALAY KAILASH KIRAN
US·4 granted patents·38 citations·filing 2007–2011
Top patents by PatentIndex Score
4 records- 0191US8441640B2Non-contact substrate support position sensing system and corresponding adjustmentsPATALAY KAILASH KIRAN·Filed 2008·Granted May 14, 2013·19 cites·20 claims
- 0287US8147137B2Pyrometry for substrate processingPATALAY KAILASH KIRAN·Filed 2008·Granted Apr 3, 2012·12 cites·25 claims
- 0375US8951351B2Wafer processing hardware for epitaxial deposition with reduced backside deposition and defectsPATALAY KAILASH KIRAN·Filed 2007·Granted Feb 10, 2015·5 cites·20 claims
- 0465US8967860B2Low temperature measurement and control using low temperature pyrometryPATALAY KAILASH KIRAN·Filed 2011·Granted Mar 3, 2015·2 cites·17 claims
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