Inventor · disambiguated record
Scott A. Hendrickson
Also filed as: HENDRICKSON SCOTT · HENDRICKSON SCOTT A
20 granted patents·10 pending applications·1,981 citations·filing 1999–2016
96Inventor score
Top patents by PatentIndex Score
30 records- 0198US7566891B2Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectorsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 28, 2009·553 cites·33 claims
- 0297US7692171B2Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectorsKASZUBA ANDRZEI·Filed 2007·Granted Apr 6, 2010·471 cites·26 claims
- 0397US6374831B1Accelerated plasma cleanAPPLIED MATERIALS INC·Filed 1999·Granted Apr 23, 2002·642 cites·15 claims
- 0496US7663121B2High efficiency UV curing systemAPPLIED MATERIALS INC·Filed 2006·Granted Feb 16, 2010·38 cites·12 claims
- 0595US7777198B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationAPPLIED MATERIALS INC·Filed 2007·Granted Aug 17, 2010·29 cites·30 claims
- 0693US8203126B2Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiationROCHA-ALVAREZ JUAN CARLOS·Filed 2010·Granted Jun 19, 2012·26 cites·15 claims
- 0792US6495233B1Apparatus for distributing gases in a chemical vapor deposition systemAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·77 cites·24 claims
- 0891US8657961B2Method for UV based silylation chamber cleanAPPLIED MATERIALS INC·Filed 2013·Granted Feb 25, 2014·8 cites·16 claims
- 0988US10570517B2Apparatus and method for UV treatment, chemical treatment, and depositionAPPLIED MATERIALS INC·Filed 2016·Granted Feb 25, 2020·2 cites·20 claims
- 1088US9506145B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2016·Granted Nov 29, 2016·3 cites·20 claims
- 1188US9364871B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2013·Granted Jun 14, 2016·4 cites·11 claims
- 1287US8753449B2Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric filmAPPLIED MATERIALS INC·Filed 2013·Granted Jun 17, 2014·9 cites·17 claims
- 1382US8309421B2Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2011·Granted Nov 13, 2012·5 cites·17 claims
- 1480US6814087B2Accelerated plasma cleanAPPLIED MATERIALS INC·Filed 2002·Granted Nov 9, 2004·20 cites·12 claims
- 1577US6443435B1Vaporization of precursors at point of useAPPLIED MATERIALS INC·Filed 2000·Granted Sep 3, 2002·39 cites·29 claims
- 1673US6300255B1Method and apparatus for processing semiconductive wafersAPPLIED MATERIALS INC·Filed 1999·Granted Oct 9, 2001·40 cites·11 claims
- 1769US7506654B2Accelerated plasma cleanAPPLIED MATERIALS INC·Filed 2004·Granted Mar 24, 2009·10 cites·13 claims
- 1868US8841629B2Microwave excursion detection for semiconductor processingHENDRICKSON SCOTT A·Filed 2012·Granted Sep 23, 2014·3 cites·17 claims
- 1957US2009162259A1High efficiency uv curing systemNOWAK THOMAS·Filed 2009·Application pending·0 cites
- 2054US2007298167A1Ozone abatement in a re-circulating cooling systemAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2150US2006249175A1High efficiency UV curing systemAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2250US2006251827A1Tandem uv chamber for curing dielectric materialsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2349US2012258259A1Apparatus and method for uv treatment, chemical treatment, and depositionBANSAL AMIT·Filed 2012·Application pending·0 cites
- 2448US2013122611A1Dual-bulb lamphead control methodologyYANG YAO-HUNG·Filed 2012·Application pending·0 cites
- 2544US2009305515A1Method and apparatus for uv curing with water vaporHO DUSTIN·Filed 2008·Application pending·0 cites
- 2643US2007295012A1Nitrogen enriched cooling air module for uv curing systemAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 2742US8343881B2Silicon dioxide layer deposited with BDEASAPPLIED MATERIALS INC·Filed 2010·Granted Jan 1, 2013·0 cites·20 claims
- 2842US2014264059A1Light irradiance and thermal measurement in uv and cvd chambersAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2936US2012097330A1Dual delivery chamber designIYENGAR PRAHALLAD·Filed 2010·Application pending·0 cites
- 3030US6311959B1Method and apparatus for generating controlled mixture of organic vapor and inert gasAPPLIED MATERIALS INC·Filed 1999·Granted Nov 6, 2001·2 cites·17 claims
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