US2007295012A1PendingUtilityA1

Nitrogen enriched cooling air module for uv curing system

Assignee: APPLIED MATERIALS INCPriority: Jun 26, 2006Filed: Nov 3, 2006Published: Dec 27, 2007
Est. expiryJun 26, 2026(expired)· nominal 20-yr term from priority
H10P 72/0436H10P 72/0434H10W 40/00
43
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Claims

Abstract

A re-circulating cooling system can be used with a curing system in order to reduce the exhaust requirements for the system. Further, using a cooling fluid such as nitrogen reduces the production of ozone and the sealing requirements for the system. A simple heat exchanger can be used between return and supply reservoirs in order to remove heat added to the re-circulating fluid during circulation past the curing radiation source. The nitrogen can come from a nitrogen source, or from a membrane or other device operable to split feed gas into its molecular components to provide a source of gas rich in nitrogen. An ozone destruction unit can be used with such a cooling system to reduce the amount of ozone to acceptable levels, and to minimize consumption of the nitrogen. A catalyst can be used to deplete the ozone that does not get consumed during the reaction.

Claims

exact text as granted — not AI-modified
1 . A system for providing cooling for a UV curing system including a UV lamp source and a curing chamber, comprising:
 a supply reservoir operable to contain a volume of fluid;   a flow generating device operable to direct a flow of fluid from the supply reservoir past the UV lamp source, the flow of fluid operable to remove heat energy from the UV lamp source;   return piping connected to the curing chamber and operable to receive the heated flow of fluid and direct the flow of heated fluid;   a return reservoir connected to the return piping and operable to receive the heated flow of fluid directed by the return piping; and   a heat exchanger positioned along a flow path between the return reservoir and the supply reservoir and operable to remove the heat energy from the heated flow of fluid, whereby the flow of fluid is directed back into the supply reservoir.   
     
     
         2 . A system according to  claim 1 , wherein:
 the fluid is one of a nitrogen gas and a nitrogen-enriched gas.   
     
     
         3 . A system according to  claim 1 , further comprising:
 a gas separation module operable to receive a flow of feed air and separate out at least one component of the feed air to generate a source of the fluid for the supply reservoir.   
     
     
         4 . A system according to  claim 3 , wherein:
 the gas separation module includes a gas separation membrane.   
     
     
         5 . A system according to  claim 1 , wherein:
 the heat exchanger is a water-cooled heat exchanger.   
     
     
         6 . A system according to  claim 1 , wherein:
 multiple flow generating devices are operable to direct a flow of fluid from the supply reservoir past multiple UV lamp sources.   
     
     
         7 . A system according to  claim 1 , wherein:
 the flow generating device is a circulating blower.   
     
     
         8 . An air module for providing a re-circulating flow of cooling fluid to a radiation-based curing device, comprising:
 a supply reservoir operable to receive and contain a volume of fluid;   a flow generating device operable to direct a flow of fluid from the supply reservoir to the radiation-based curing device, the flow of fluid operable to remove heat energy from the curing device;   a return reservoir operable to receive a heated flow of fluid exiting the radiation-based curing device; and   a heat exchanger positioned along a flow path between the return reservoir and the supply reservoir, the heat exchanger operable to remove the heat energy from the heated flow of fluid and direct the flow of fluid back into the supply reservoir.   
     
     
         9 . An air module according to  claim 8 , wherein:
 the fluid is one of a nitrogen gas and a nitrogen-enriched gas.   
     
     
         10 . An air module according to  claim 8 , further comprising:
 a gas separation module operable to receive a flow of feed air and separate out at least one component of the feed air to generate a source of the fluid for the supply reservoir.   
     
     
         11 . An air module according to  claim 10 , wherein:
 the gas separation module includes a gas separation membrane.   
     
     
         12 . An air module according to  claim 8 , wherein:
 the supply reservoir is operable to receive a volume of fluid from a source of pure nitrogen gas.   
     
     
         13 . An air module according to  claim 8 , wherein:
 the heat exchanger is a water-cooled heat exchanger.   
     
     
         14 . An air module according to  claim 8 , wherein:
 multiple flow generating devices are operable to direct a flow of fluid from the supply reservoir to multiple portions of the curing device.   
     
     
         15 . An air module according to  claim 8 , wherein:
 the flow generating device is a circulating blower.   
     
     
         16 . A method of cooling a UV curing system including a UV lamp source and a curing chamber, comprising:
 directing a flow of cooling fluid from a supply reservoir past the UV lamp source, the flow of fluid operable to remove heat energy from the UV lamp source;   directing a heated flow of the cooling fluid from the curing chamber to a return reservoir;   removing heat energy from the heated flow of cooling fluid; and   directing the heat-removed flow of cooling fluid back into the supply reservoir, whereby the cooling fluid is operable to be re-circulated past the UV lamp source.   
     
     
         17 . A method according to  claim 16 , further comprising:
 receiving the fluid into the supply reservoir from a fluid source.   
     
     
         18 . A method according to  claim 17 , further comprising:
 passing a flow of feed air through a membrane device to generate the fluid.   
     
     
         19 . A method according to  claim 16 , wherein:
 directing a flow of cooling fluid includes directing a flow of cooling fluid selected from the group consisting of a nitrogen gas and a nitrogen-enriched gas.   
     
     
         20 . A method according to  claim 16 , further comprising:
 circulating water through the heat exchanger to remove heat from the heat exchanger.

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