Inventor · disambiguated record
Babak Adibi
Also filed as: ADIBI BABAK
24 granted patents·11 pending applications·387 citations·filing 1996–2018
96Inventor score
Top patents by PatentIndex Score
35 records- 0194US8697552B2Method for ion implant using grid assemblyADIBI BABAK·Filed 2012·Granted Apr 15, 2014·13 cites·24 claims
- 0292US8997688B2Ion implant system having grid assemblyADIBI BABAK·Filed 2012·Granted Apr 7, 2015·9 cites·17 claims
- 0392US8124499B2Method and structure for thick layer transfer using a linear acceleratorHENLEY FRANCOIS J·Filed 2007·Granted Feb 28, 2012·29 cites·25 claims
- 0491US8697553B2Solar cell fabrication with faceting and ion implantationADIBI BABAK·Filed 2009·Granted Apr 15, 2014·23 cites·13 claims
- 0591US5932882AIon implanter with post mass selection decelerationAPPLIED MATERIALS INC·Filed 1996·Granted Aug 3, 1999·75 cites·44 claims
- 0690US7225047B2Method, system and medium for controlling semiconductor wafer processes using critical dimension measurementsAPPLIED MATERIALS INC·Filed 2002·Granted May 29, 2007·46 cites·44 claims
- 0789US8749053B2Plasma grid implant system for use in solar cell fabricationsADIBI BABAK·Filed 2010·Granted Jun 10, 2014·7 cites·18 claims
- 0887US6093625AApparatus for and methods of implanting desired chemical species in semiconductor substratesAPPLIED MATERIALS INC·Filed 1998·Granted Jul 25, 2000·70 cites·19 claims
- 0987US5883391AIon implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation processAPPLIED MATERIALS INC·Filed 1997·Granted Mar 16, 1999·51 cites·14 claims
- 1086US9543114B2Implant masking and alignment system with rollersINTEVAC INC·Filed 2015·Granted Jan 10, 2017·4 cites·16 claims
- 1186US9324598B2Substrate processing system and methodINTEVAC INC·Filed 2012·Granted Apr 26, 2016·7 cites·19 claims
- 1286US9303314B2Ion implant system having grid assemblyINTEVAC INC·Filed 2014·Granted Apr 5, 2016·4 cites·23 claims
- 1383US9741894B2Ion implant system having grid assemblyINTEVAC INC·Filed 2016·Granted Aug 22, 2017·2 cites·7 claims
- 1482US9875922B2Substrate processing system and methodINTEVAC INC·Filed 2016·Granted Jan 23, 2018·3 cites·16 claims
- 1582US9318332B2Grid for plasma ion implantINTEVAC INC·Filed 2013·Granted Apr 19, 2016·4 cites·22 claims
- 1681US8871619B2Application specific implant system and method for use in solar cell fabricationsADIBI BABAK·Filed 2009·Granted Oct 28, 2014·7 cites·15 claims
- 1772US11255013B2Ion implantation for modification of thin film coatings on glassINTEVAC INC·Filed 2017·Granted Feb 22, 2022·0 cites·18 claims
- 1868US9850570B2Ion implantation for modification of thin film coatings on glassINTEVAC INC·Filed 2016·Granted Dec 26, 2017·0 cites·10 claims
- 1968US6200883B1Ion implantation methodAPPLIED MATERIALS INC·Filed 1997·Granted Mar 13, 2001·33 cites·18 claims
- 2065US2014166087A1Solar cells having graded doped regions and methods of making solar cells having graded doped regionsINTEVAC INC·Filed 2012·Application pending·0 cites
- 2162US10636935B2Ion implant system having grid assemblyINTEVAC INC·Filed 2017·Granted Apr 28, 2020·0 cites·20 claims
- 2257US2016322523A1Solar cells having graded doped regions and methods of making solar cells having graded doped regionsINTEVAC INC·Filed 2016·Application pending·0 cites
- 2355US10854772B2Multi-piece substrate holder and alignment mechanismINTEVAC INC·Filed 2018·Granted Dec 1, 2020·0 cites·18 claims
- 2452US2007288116A1Method, system and medium for controlling semiconductor wafer processes using critical dimension measurementsAL-BAYATI AMIR·Filed 2007·Application pending·0 cites
- 2551US10559710B2System of height and alignment rollers for precise alignment of wafers for ion implantationINTEVAC INC·Filed 2018·Granted Feb 11, 2020·0 cites·20 claims
- 2649US9583661B2Grid for plasma ion implantINTEVAC INC·Filed 2016·Granted Feb 28, 2017·0 cites·20 claims
- 2746US10446430B2Patterned chuck for substrate processingINTEVAC INC·Filed 2017·Granted Oct 15, 2019·0 cites·18 claims
- 2846US2008128641A1Apparatus and method for introducing particles using a radio frequency quadrupole linear accelerator for semiconductor materialsSILICON GENESIS CORP·Filed 2007·Application pending·0 cites
- 2942US2016332908A1Textured ar with protective thin filmINTEVAC INC·Filed 2016·Application pending·0 cites
- 3039US2012122273A1Direct current ion implantation for solid phase epitaxial regrowth in solar cell fabricationCHUN MOON·Filed 2011·Application pending·0 cites
- 3139US2018096823A1Large area energetic ion sourceINTEVAC INC·Filed 2017·Application pending·0 cites
- 3238US2017242503A1Smudge, scratch and wear resistant glass via ion implantationINTEVAC INC·Filed 2017·Application pending·0 cites
- 3338US2011192993A1Adjustable shadow mask assembly for use in solar cell fabricationsINTEVAC INC·Filed 2011·Application pending·0 cites
- 3435US2004072446A1Method for fabricating an ultra shallow junction of a field effect transistorAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 3534US2011162703A1Advanced high efficientcy crystalline solar cell fabrication methodSOLAR IMPLANT TECHNOLOGIES INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →