Inventor · disambiguated record
Joseph D. Sweeney
Also filed as: SWEENEY JOSEPH · SWEENEY JOSEPH D
54 granted patents·35 pending applications·488 citations·filing 1997–2025
98Inventor score
Files withENTEGRIS INC53ADVANCED TECH MATERIALS14KAIM ROBERT5SWEENEY JOSEPH D3APPLIED MATERIALS INC1
Top patents by PatentIndex Score
89 records- 0197US8062965B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Nov 22, 2011·21 cites·20 claims
- 0295US8237134B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemKAIM ROBERT·Filed 2012·Granted Aug 7, 2012·23 cites·20 claims
- 0395US7485169B2Semiconductor manufacturing facility utilizing exhaust recirculationADVANCED TECH MATERIALS·Filed 2006·Granted Feb 3, 2009·19 cites·20 claims
- 0493US10247363B2Smart packageENTEGRIS INC·Filed 2016·Granted Apr 2, 2019·7 cites·19 claims
- 0593US9897257B2Anti-spike pressure management of pressure-regulated fluid storage and delivery vesselsENTEGRIS INC·Filed 2013·Granted Feb 20, 2018·16 cites·16 claims
- 0693US8598022B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Dec 3, 2013·12 cites·31 claims
- 0793US8399865B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemKAIM ROBERT·Filed 2012·Granted Mar 19, 2013·11 cites·29 claims
- 0892US11299802B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2019·Granted Apr 12, 2022·6 cites·13 claims
- 0992US9205392B2Apparatus and method for preparation of compounds or intermediates thereof from a solid material, and using such compounds and intermediatesBYL OLEG·Filed 2011·Granted Dec 8, 2015·23 cites·23 claims
- 1092US8779383B2Enriched silicon precursor compositions and apparatus and processes for utilizing sameADVANCED TECH MATERIALS·Filed 2013·Granted Jul 15, 2014·13 cites·17 claims
- 1191US8796131B2Ion implantation system and methodJONES EDWARD E·Filed 2010·Granted Aug 5, 2014·18 cites·20 claims
- 1290US11139145B2Ion implantation system with mixture of arc chamber materialsENTEGRIS INC·Filed 2020·Granted Oct 5, 2021·2 cites·20 claims
- 1389US6805728B2Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent streamADVANCED TECH MATERIALS·Filed 2002·Granted Oct 19, 2004·47 cites·44 claims
- 1488US9111860B2Ion implantation system and methodADVANCED TECH MATERIALS·Filed 2014·Granted Aug 18, 2015·6 cites·21 claims
- 1588US8785889B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemADVANCED TECH MATERIALS·Filed 2013·Granted Jul 22, 2014·5 cites·54 claims
- 1688US8603252B2Cleaning of semiconductor processing systemsDIMEO FRANK·Filed 2007·Granted Dec 10, 2013·21 cites·6 claims
- 1788US5935283AClog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing systemATMI ECOSYS CORP·Filed 1997·Granted Aug 10, 1999·85 cites·19 claims
- 1886US11333302B2Adsorbent-based, mechanically-regulated gas storage and delivery vesselENTEGRIS INC·Filed 2019·Granted May 17, 2022·2 cites·14 claims
- 1986US6759018B1Method for point-of-use treatment of effluent gas streamsADVANCED TECH MATERIALS·Filed 1998·Granted Jul 6, 2004·62 cites·9 claims
- 2083US10109488B2Phosphorus or arsenic ion implantation utilizing enhanced source techniquesENTEGRIS INC·Filed 2015·Granted Oct 23, 2018·3 cites·19 claims
- 2183US9171725B2Enriched silicon precursor compositions and apparatus and processes for utilizing sameENTEGRIS INC·Filed 2014·Granted Oct 27, 2015·4 cites·20 claims
- 2283US9012874B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemENTEGRIS INC·Filed 2014·Granted Apr 21, 2015·3 cites·25 claims
- 2383US7105037B2Semiconductor manufacturing facility utilizing exhaust recirculationADVANCED TECH MATERIALS·Filed 2003·Granted Sep 12, 2006·39 cites·32 claims
- 2482US12347639B2Method and systems useful for producing aluminum ionsENTEGRIS INC·Filed 2023·Granted Jul 1, 2025·0 cites·6 claims
- 2582US10845006B2Smart packageENTEGRIS INC·Filed 2019·Granted Nov 24, 2020·2 cites·13 claims
- 2682US9754786B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemENTEGRIS INC·Filed 2015·Granted Sep 5, 2017·2 cites·21 claims
- 2780US11827973B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2022·Granted Nov 28, 2023·0 cites·20 claims
- 2880US9960042B2Carbon dopant gas and co-flow for implant beam and source life performance improvementENTEGRIS INC·Filed 2013·Granted May 1, 2018·4 cites·18 claims
- 2980US9142387B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2013·Granted Sep 22, 2015·3 cites·11 claims
- 3079US8539781B2Component for solar adsorption refrigeration system and method of making such componentCARRUTHERS J DONALD·Filed 2008·Granted Sep 24, 2013·4 cites·17 claims
- 3178US9666435B2Apparatus and process for integrated gas blendingADVANCED TECH MATERIALS·Filed 2013·Granted May 30, 2017·4 cites·21 claims
- 3276US10920087B2Hydrogenated isotopically enriched boront trifluoride dopant source gas compositionENTEGRIS INC·Filed 2017·Granted Feb 16, 2021·1 cites·17 claims
- 3376US9831063B2Ion implantation compositions, systems, and methodsENTEGRIS INC·Filed 2014·Granted Nov 28, 2017·3 cites·8 claims
- 3476US8138071B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2010·Granted Mar 20, 2012·3 cites·10 claims
- 3574US10622192B2Methods and assemblies using fluorine containing and inert gases for plasma flood gun operationENTEGRIS INC·Filed 2018·Granted Apr 14, 2020·1 cites·18 claims
- 3673US11881376B2Method and systems useful for producing aluminum ionsENTEGRIS INC·Filed 2021·Granted Jan 23, 2024·0 cites·17 claims
- 3773US2025216034A1Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methodsENTEGRIS INC·Filed 2025·Application pending·0 cites
- 3870US11682540B2Ion implantation system with mixture of arc chamber materialsENTEGRIS INC·Filed 2021·Granted Jun 20, 2023·0 cites·16 claims
- 3970US7857880B2Semiconductor manufacturing facility utilizing exhaust recirculationADVANCED TECH MATERIALS·Filed 2009·Granted Dec 28, 2010·7 cites·10 claims
- 4067US10508773B2Smart packageENTEGRIS INC·Filed 2019·Granted Dec 17, 2019·0 cites·17 claims
- 4167US2022128196A1Adsorbent-type storage and delivery vessels with high purity delivery of gas, and related methodsENTEGRIS INC·Filed 2021·Application pending·0 cites
- 4265US2020248873A1Valve assemblies and fluid storage and dispensing packages comprising sameENTEGRIS INC·Filed 2020·Application pending·0 cites
- 4364US2020051819A1Carbon materials for carbon implantationENTEGRIS INC·Filed 2019·Application pending·0 cites
- 4463US2022044908A1Fluorinated compositions for ion source performance improvements in nitrogen ion implantationENTEGRIS INC·Filed 2021·Application pending·0 cites
- 4563US2021370259A1Gas supply packages, adsorbents, and related methodsENTEGRIS INC·Filed 2021·Application pending·0 cites
- 4662US11538687B2Fluorine ion implantation system with non-tungsten materials and methods of usingENTEGRIS INC·Filed 2019·Granted Dec 27, 2022·0 cites·19 claims
- 4761US9109755B2Endpoint determination for capillary-assisted flow controlSWEENEY JOSEPH D·Filed 2011·Granted Aug 18, 2015·1 cites·20 claims
- 4861US2025292990A1Gas mixtures for ion implantationENTEGRIS INC·Filed 2025·Application pending·0 cites
- 4960US2024043988A1Gas mixture as co-gas for ion implantENTEGRIS INC·Filed 2023·Application pending·0 cites
- 5060US2017330756A1Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemENTEGRIS INC·Filed 2017·Application pending·0 cites
Showing the top 50 of 89 patent records by PatentIndex Score.
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