Assignee
ENTEGRIS INC
US·695 granted patents·463 pending applications·5,044 citations·filing 1995–2025
Top patents by PatentIndex Score
1,158 records- 0198US10395963B2Electrostatic chuckENTEGRIS INC·Filed 2016·Granted Aug 27, 2019·282 cites·9 claims
- 0298US7383967B2Apparatus and methods for pumping high viscosity fluidsENTEGRIS INC·Filed 2005·Granted Jun 10, 2008·58 cites·22 claims
- 0397US11685752B2Process for preparing organotin compoundsENTEGRIS INC·Filed 2022·Granted Jun 27, 2023·8 cites·13 claims
- 0497US11358975B2Process for preparing organotin compoundsENTEGRIS INC·Filed 2021·Granted Jun 14, 2022·15 cites·18 claims
- 0597US10465286B2Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2016·Granted Nov 5, 2019·10 cites·16 claims
- 0697US9537095B2Tellurium compounds useful for deposition of tellurium containing materialsENTEGRIS INC·Filed 2014·Granted Jan 3, 2017·14 cites·20 claims
- 0797US9469898B2Method and apparatus to help promote contact of gas with vaporized materialENTEGRIS INC·Filed 2015·Granted Oct 18, 2016·10 cites·31 claims
- 0897US7878765B2System and method for monitoring operation of a pumpENTEGRIS INC·Filed 2006·Granted Feb 1, 2011·55 cites·20 claims
- 0997US7740024B2System and method for flow monitoring and controlENTEGRIS INC·Filed 2005·Granted Jun 22, 2010·70 cites·13 claims
- 1097US7547049B2O-ring-less low profile fittings and fitting assembliesENTEGRIS INC·Filed 2006·Granted Jun 16, 2009·60 cites·18 claims
- 1197US7494265B2System and method for controlled mixing of fluids via temperatureENTEGRIS INC·Filed 2006·Granted Feb 24, 2009·43 cites·19 claims
- 1297US7476087B2Pump controller for precision pumping apparatusENTEGRIS INC·Filed 2005·Granted Jan 13, 2009·58 cites·9 claims
- 1396US11697660B2Process for preparing organotin compoundsENTEGRIS INC·Filed 2022·Granted Jul 11, 2023·11 cites·14 claims
- 1496US10392700B2Solid vaporizerENTEGRIS INC·Filed 2015·Granted Aug 27, 2019·14 cites·15 claims
- 1596US8029247B2System and method for pressure compensation in a pumpENTEGRIS INC·Filed 2006·Granted Oct 4, 2011·28 cites·37 claims
- 1696US7897196B2Error volume system and method for a pumpENTEGRIS INC·Filed 2006·Granted Mar 1, 2011·37 cites·25 claims
- 1796US7684446B2System and method for multiplexing setpointsENTEGRIS INC·Filed 2006·Granted Mar 23, 2010·42 cites·15 claims
- 1895US10895010B2Solid precursor-based delivery of fluid utilizing controlled solids morphologyENTEGRIS INC·Filed 2016·Granted Jan 19, 2021·5 cites·18 claims
- 1995US9468901B2PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing sameENTEGRIS INC·Filed 2015·Granted Oct 18, 2016·7 cites·22 claims
- 2095US8382444B2System and method for monitoring operation of a pumpENTEGRIS INC·Filed 2011·Granted Feb 26, 2013·17 cites·14 claims
- 2195US7328727B2Substrate container with fluid-sealing flow passagewayENTEGRIS INC·Filed 2005·Granted Feb 12, 2008·32 cites·8 claims
- 2294US12037684B2Solids vaporizerENTEGRIS INC·Filed 2022·Granted Jul 16, 2024·4 cites·12 claims
- 2394US11779866B2Modular filter manifoldENTEGRIS INC·Filed 2021·Granted Oct 10, 2023·2 cites·15 claims
- 2494US11587810B2Wafer cushionENTEGRIS INC·Filed 2020·Granted Feb 21, 2023·6 cites·12 claims
- 2594US10471567B2CMP pad conditioning assemblyENTEGRIS INC·Filed 2016·Granted Nov 12, 2019·8 cites·13 claims
- 2694US9731368B2Apparatus and method for stripping solder metals during the recycling of waste electrical and electronic equipmentENTEGRIS INC·Filed 2015·Granted Aug 15, 2017·5 cites·26 claims
- 2794US8919563B2Methods and apparatus for large diameter wafer handlingENTEGRIS INC·Filed 2013·Granted Dec 30, 2014·16 cites·9 claims
- 2894US7607543B2Reticle pod with isolation systemENTEGRIS INC·Filed 2006·Granted Oct 27, 2009·43 cites·20 claims
- 2994US7534287B2Porous sintered composite materialsENTEGRIS INC·Filed 2007·Granted May 19, 2009·28 cites·15 claims
- 3094US7296582B2Method and system for purging a dispensed fluid within a fluid dispensing system including a filter-free connector apparatusENTEGRIS INC·Filed 2005·Granted Nov 20, 2007·25 cites·13 claims
- 3194US7112237B2Porous sintered composite materialsENTEGRIS INC·Filed 2003·Granted Sep 26, 2006·62 cites·19 claims
- 3293US11901205B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2023·Granted Feb 13, 2024·2 cites·9 claims
- 3393US10247363B2Smart packageENTEGRIS INC·Filed 2016·Granted Apr 2, 2019·7 cites·19 claims
- 3493US9897257B2Anti-spike pressure management of pressure-regulated fluid storage and delivery vesselsENTEGRIS INC·Filed 2013·Granted Feb 20, 2018·16 cites·16 claims
- 3593USD767234SWafer support ringENTEGRIS INC·Filed 2015·Granted Sep 20, 2016·66 cites·1 claims
- 3693US9283512B2Adsorbent having utility for CO2 capture from gas mixturesENTEGRIS INC·Filed 2015·Granted Mar 15, 2016·5 cites·34 claims
- 3793US9102693B2Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride filmsENTEGRIS INC·Filed 2014·Granted Aug 11, 2015·8 cites·20 claims
- 3893US8025486B2System and method for valve sequencing in a pumpENTEGRIS INC·Filed 2006·Granted Sep 27, 2011·23 cites·54 claims
- 3993US7900776B2Wafer container with door actuated wafer restraintENTEGRIS INC·Filed 2006·Granted Mar 8, 2011·21 cites·14 claims
- 4093US7850431B2System and method for control of fluid pressureENTEGRIS INC·Filed 2005·Granted Dec 14, 2010·24 cites·30 claims
- 4193US7400383B2Environmental control in a reticle SMIF podENTEGRIS INC·Filed 2006·Granted Jul 15, 2008·43 cites·31 claims
- 4292US11299802B2Germanium tetraflouride and hydrogen mixtures for an ion implantation systemENTEGRIS INC·Filed 2019·Granted Apr 12, 2022·6 cites·13 claims
- 4392US10526697B2High-purity tungsten hexacarbonyl for solid source deliveryENTEGRIS INC·Filed 2016·Granted Jan 7, 2020·4 cites·18 claims
- 4492US9640757B2Double self-aligned phase change memory device structureENTEGRIS INC·Filed 2013·Granted May 2, 2017·8 cites·20 claims
- 4592US9573747B2Folded liner for use with an overpack and methods of manufacturing the sameENTEGRIS INC·Filed 2015·Granted Feb 21, 2017·7 cites·22 claims
- 4692US9540408B2Cobalt precursors for low temperature ALD or CVD of cobalt-based thin filmsENTEGRIS INC·Filed 2013·Granted Jan 10, 2017·5 cites·6 claims
- 4792US7760104B2Identification tag for fluid containment drumENTEGRIS INC·Filed 2006·Granted Jul 20, 2010·50 cites·15 claims
- 4892US7726876B2System and method for non-intrusive thermal monitorENTEGRIS INC·Filed 2008·Granted Jun 1, 2010·35 cites·27 claims
- 4992US7528936B2Substrate container with pressure equalizationENTEGRIS INC·Filed 2006·Granted May 5, 2009·27 cites·12 claims
- 5092US7523830B2Wafer container with secondary wafer restraint systemENTEGRIS INC·Filed 2005·Granted Apr 28, 2009·21 cites·20 claims
Showing the top 50 of 1,158 patent records by PatentIndex Score.
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