Inventor · disambiguated record
Tony Kaushal
Also filed as: KAUSHAL TONY · KAUSHAL TONY S · KAUSHAL TONY SHALEEN
24 granted patents·8 pending applications·689 citations·filing 1990–2025
96Inventor score
Files withAPPLIED MATERIALS INC19LAM RES CORP8CATERPILLAR INC1LUBOMIRSKY DMITRY1NARENDRNATH KADTHALA RAMAYA1
Top patents by PatentIndex Score
32 records- 0197US6367412B1Porous ceramic liner for a plasma sourceAPPLIED MATERIALS INC·Filed 2000·Granted Apr 9, 2002·135 cites·20 claims
- 0296US11365479B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2020·Granted Jun 21, 2022·8 cites·16 claims
- 0395US10217614B2Ceramic gas distribution plate with embedded electrodeLAM RES CORP·Filed 2015·Granted Feb 26, 2019·32 cites·18 claims
- 0495US6468490B1Abatement of fluorine gas from effluentAPPLIED MATERIALS INC·Filed 2000·Granted Oct 22, 2002·78 cites·36 claims
- 0594US12227837B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Feb 18, 2025·2 cites·19 claims
- 0694US10760158B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·14 cites·23 claims
- 0793US6490145B1Substrate support pedestalAPPLIED MATERIALS INC·Filed 2001·Granted Dec 3, 2002·86 cites·40 claims
- 0893US6391146B1Erosion resistant gas energizerAPPLIED MATERIALS INC·Filed 2000·Granted May 21, 2002·73 cites·50 claims
- 0988US6689252B1Abatement of hazardous gases in effluentAPPLIED MATERIALS INC·Filed 1999·Granted Feb 10, 2004·80 cites·89 claims
- 1087US6673323B1Treatment of hazardous gases in effluentAPPLIED MATERIALS INC·Filed 2000·Granted Jan 6, 2004·47 cites·26 claims
- 1181US5137789AComposite ceramic and metal articleCATERPILLAR INC·Filed 1990·Granted Aug 11, 1992·43 cites·5 claims
- 1279US12163219B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Dec 10, 2024·0 cites·19 claims
- 1379US7670688B2Erosion-resistant components for plasma process chambersAPPLIED MATERIALS INC·Filed 2001·Granted Mar 2, 2010·15 cites·32 claims
- 1478US6824748B2Heated catalytic treatment of an effluent gas from a substrate fabrication processAPPLIED MATERIALS INC·Filed 2001·Granted Nov 30, 2004·18 cites·23 claims
- 1578US6789498B2Elements having erosion resistanceAPPLIED MATERIALS INC·Filed 2002·Granted Sep 14, 2004·17 cites·19 claims
- 1676US6709314B2Chemical mechanical polishing endpoinat detectionAPPLIED MATERIALS INC·Filed 2001·Granted Mar 23, 2004·17 cites·22 claims
- 1775US2025263838A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2025·Application pending·0 cites
- 1871US6790768B2Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defectsAPPLIED MATERIALS INC·Filed 2001·Granted Sep 14, 2004·13 cites·40 claims
- 1970US2025069857A1Multilayer coating for corrosion resistanceAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2069US7848076B2Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcingAPPLIED MATERIALS INC·Filed 2007·Granted Dec 7, 2010·3 cites·19 claims
- 2168US12473659B2Conformal yttrium oxide coatingAPPLIED MATERIALS INC·Filed 2021·Granted Nov 18, 2025·0 cites·19 claims
- 2266US2021292893A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2019·Application pending·0 cites
- 2364US12191120B2Multilayer coating for corrosion resistanceAPPLIED MATERIALS INC·Filed 2022·Granted Jan 7, 2025·0 cites·14 claims
- 2460US8108981B2Method of making an electrostatic chuck with reduced plasma penetration and arcingLUBOMIRSKY DMITRY·Filed 2007·Granted Feb 7, 2012·1 cites·18 claims
- 2559US6960521B2Method and apparatus for polishing metal and dielectric substratesAPPLIED MATERIALS INC·Filed 2004·Granted Nov 1, 2005·6 cites·34 claims
- 2655US9202736B2Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcingNARENDRNATH KADTHALA RAMAYA·Filed 2007·Granted Dec 1, 2015·1 cites·15 claims
- 2753US12266509B2Multilayer coatings of component parts for a work piece processing chamberLAM RES CORP·Filed 2019·Granted Apr 1, 2025·0 cites·20 claims
- 2853US2023317634A1Coatings with diffusion barriers for corrosion and contamination protectionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2951US2007022958A1Abatement of fluorine gas from effluentSHAMOUILIAN SHAMOUIL·Filed 2006·Application pending·0 cites
- 3047US2002192129A1Abatement of fluorine gas from effluentAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 3140US2003029563A1Corrosion resistant coating for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 3236US2003060127A1Sensor for in-situ pad wear during CMPFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →