Assignee
LUBOMIRSKY DMITRY
US·9 granted patents·3 pending applications·488 citations·filing 2007–2013
Top patents by PatentIndex Score
12 records- 0198US9068265B2Gas distribution plate with discrete protective elementsLUBOMIRSKY DMITRY·Filed 2012·Granted Jun 30, 2015·75 cites·20 claims
- 0297US8937800B2Electrostatic chuck with advanced RF and temperature uniformityLUBOMIRSKY DMITRY·Filed 2013·Granted Jan 20, 2015·305 cites·20 claims
- 0396US8771538B2Plasma source designLUBOMIRSKY DMITRY·Filed 2010·Granted Jul 8, 2014·28 cites·5 claims
- 0496US8232176B2Dielectric deposition and etch back processes for bottom up gapfillLUBOMIRSKY DMITRY·Filed 2007·Granted Jul 31, 2012·48 cites·6 claims
- 0589US8742665B2Plasma source designLUBOMIRSKY DMITRY·Filed 2010·Granted Jun 3, 2014·20 cites·24 claims
- 0680US8333842B2Apparatus for etching semiconductor wafersLUBOMIRSKY DMITRY·Filed 2008·Granted Dec 18, 2012·7 cites·18 claims
- 0777US9285168B2Module for ozone cure and post-cure moisture treatmentLUBOMIRSKY DMITRY·Filed 2011·Granted Mar 15, 2016·4 cites·13 claims
- 0860US8108981B2Method of making an electrostatic chuck with reduced plasma penetration and arcingLUBOMIRSKY DMITRY·Filed 2007·Granted Feb 7, 2012·1 cites·18 claims
- 0953US2012073501A1Process chamber for dielectric gapfillLUBOMIRSKY DMITRY·Filed 2011·Application pending·0 cites
- 1042US2013276980A1Esc with cooling baseLUBOMIRSKY DMITRY·Filed 2013·Application pending·0 cites
- 1140US8524004B2Loadlock batch ozone cureLUBOMIRSKY DMITRY·Filed 2011·Granted Sep 3, 2013·0 cites·10 claims
- 1236US2012103970A1Heater with independent center zone controlLUBOMIRSKY DMITRY·Filed 2011·Application pending·0 cites
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