Inventor · disambiguated record
Takeshi Asayama
Also filed as: ASAYAMA TAKESHI
21 granted patents·4 pending applications·69 citations·filing 2009–2023
92Inventor score
Top patents by PatentIndex Score
25 records- 0194US8158959B2Extreme ultraviolet light source apparatusASAYAMA TAKESHI·Filed 2010·Granted Apr 17, 2012·14 cites·16 claims
- 0293US8586954B2Extreme ultraviolet light source apparatusASAYAMA TAKESHI·Filed 2012·Granted Nov 19, 2013·13 cites·17 claims
- 0391US9742141B2Laser chamberGIGAPHOTON INC·Filed 2016·Granted Aug 22, 2017·6 cites·6 claims
- 0489US8610095B2Extreme ultraviolet light source deviceYABU TAKAYUKI·Filed 2010·Granted Dec 17, 2013·12 cites·13 claims
- 0586US11079686B2Excimer laser apparatus and electronic-device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Aug 3, 2021·2 cites·18 claims
- 0685US8536550B2Method and apparatus for cleaning collector mirror in EUV light generatorASAYAMA TAKESHI·Filed 2009·Granted Sep 17, 2013·7 cites·15 claims
- 0782US11451003B2Laser gas regenerating apparatus and electronic device manufacturing methodGIGAPHOTON INC·Filed 2020·Granted Sep 20, 2022·1 cites·40 claims
- 0874US8212228B2Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2009·Granted Jul 3, 2012·9 cites·16 claims
- 0971US9837780B2Excimer laser apparatus and excimer laser systemGIGAPHOTON INC·Filed 2016·Granted Dec 5, 2017·1 cites·4 claims
- 1071US8901524B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Dec 2, 2014·2 cites·21 claims
- 1165US2023318252A1Control method of laser system, laser system, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2023·Application pending·0 cites
- 1262US2014166046A1Method and apparatus for cleaning collector mirror in euv light generatorGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 1360US10177520B2Excimer laser apparatus and excimer laser systemGIGAPHOTON INC·Filed 2017·Granted Jan 8, 2019·0 cites·14 claims
- 1459US9991665B2Laser systemGIGAPHOTON INC·Filed 2017·Granted Jun 5, 2018·0 cites·15 claims
- 1556US9806490B2Laser systemGIGAPHOTON INC·Filed 2016·Granted Oct 31, 2017·0 cites·9 claims
- 1655US9853410B2Gas laser device and control method thereforGIGAPHOTON INC·Filed 2016·Granted Dec 26, 2017·0 cites·14 claims
- 1752US8481983B2Extreme ultra violet light source apparatusMORIYA MASATO·Filed 2009·Granted Jul 9, 2013·2 cites·12 claims
- 1850US10971886B2Laser apparatusGIGAPHOTON INC·Filed 2019·Granted Apr 6, 2021·0 cites·11 claims
- 1950US10965090B2Laser apparatusGIGAPHOTON INC·Filed 2019·Granted Mar 30, 2021·0 cites·17 claims
- 2050US9601893B2Laser apparatusGIGAPHOTON INC·Filed 2016·Granted Mar 21, 2017·0 cites·7 claims
- 2148US2013126762A1Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 2245US2012228527A1Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2012·Application pending·0 cites
- 2343US11239625B2Laser apparatus including gas supply device and exhausting deviceGIGAPHOTON INC·Filed 2018·Granted Feb 1, 2022·0 cites·5 claims
- 2443US9331450B2Laser apparatusGIGAPHOTON INC·Filed 2015·Granted May 3, 2016·0 cites·9 claims
- 2542US10050403B2Excimer laser chamber deviceGIGAPHOTON INC·Filed 2017·Granted Aug 14, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →