Assignee
MORIYA MASATO
JP·17 granted patents·3 pending applications·143 citations·filing 2008–2012
Top patents by PatentIndex Score
20 records- 0195US8395133B2Apparatus and method of adjusting a laser light source for an EUV source deviceMORIYA MASATO·Filed 2009·Granted Mar 12, 2013·21 cites·27 claims
- 0295US8242472B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceMORIYA MASATO·Filed 2009·Granted Aug 14, 2012·37 cites·34 claims
- 0391US8502178B2Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereonMORIYA MASATO·Filed 2012·Granted Aug 6, 2013·12 cites·19 claims
- 0490US8399870B2Extreme ultraviolet light source device and control method for extreme ultraviolet light source deviceMORIYA MASATO·Filed 2012·Granted Mar 19, 2013·8 cites·17 claims
- 0586US8198613B2Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source deviceMORIYA MASATO·Filed 2009·Granted Jun 12, 2012·12 cites·55 claims
- 0684US8256441B2Method for cleaning optical element of EUV light source device and optical element cleaning deviceMORIYA MASATO·Filed 2008·Granted Sep 4, 2012·15 cites·6 claims
- 0783US8847181B2System and method for generating extreme ultraviolet lightMORIYA MASATO·Filed 2012·Granted Sep 30, 2014·6 cites·11 claims
- 0878US8536551B2Extreme ultra violet light source apparatusMORIYA MASATO·Filed 2009·Granted Sep 17, 2013·10 cites·14 claims
- 0976US8592787B2Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source deviceMORIYA MASATO·Filed 2012·Granted Nov 26, 2013·3 cites·39 claims
- 1075US8173984B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2009·Granted May 8, 2012·8 cites·27 claims
- 1172US8294129B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2011·Granted Oct 23, 2012·3 cites·7 claims
- 1268US8698113B2Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatusMORIYA MASATO·Filed 2011·Granted Apr 15, 2014·1 cites·4 claims
- 1367US9325150B2Alignment system and extreme ultraviolet light generation systemMORIYA MASATO·Filed 2012·Granted Apr 26, 2016·2 cites·7 claims
- 1458US8227778B2Semiconductor exposure device using extreme ultra violet radiationMORIYA MASATO·Filed 2009·Granted Jul 24, 2012·3 cites·18 claims
- 1552US8481983B2Extreme ultra violet light source apparatusMORIYA MASATO·Filed 2009·Granted Jul 9, 2013·2 cites·12 claims
- 1648US8507885B2Semiconductor exposure device using extreme ultra violet radiationMORIYA MASATO·Filed 2012·Granted Aug 13, 2013·0 cites·20 claims
- 1747US2012298134A1Method for cleaning optical element of euv light source device and optical element cleaning deviceMORIYA MASATO·Filed 2012·Application pending·0 cites
- 1840US2011309271A1Spectral purity filter and extreme ultraviolet light generation apparatus provided with the spectral purity filterMORIYA MASATO·Filed 2011·Application pending·0 cites
- 1939US9128391B2Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatusMORIYA MASATO·Filed 2011·Granted Sep 8, 2015·0 cites·16 claims
- 2039US2012305809A1Apparatus and method for generating extreme ultraviolet lightMORIYA MASATO·Filed 2012·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →