Assignee
ASAYAMA TAKESHI
JP·3 granted patents·34 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0194US8158959B2Extreme ultraviolet light source apparatusASAYAMA TAKESHI·Filed 2010·Granted Apr 17, 2012·14 cites·16 claims
- 0293US8586954B2Extreme ultraviolet light source apparatusASAYAMA TAKESHI·Filed 2012·Granted Nov 19, 2013·13 cites·17 claims
- 0385US8536550B2Method and apparatus for cleaning collector mirror in EUV light generatorASAYAMA TAKESHI·Filed 2009·Granted Sep 17, 2013·7 cites·15 claims
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