Inventor · disambiguated record
Boris Fishkin
Also filed as: FISHKIN BORIS
39 granted patents·7 pending applications·1,814 citations·filing 1990–2008
99Inventor score
Top patents by PatentIndex Score
46 records- 0199US5884640AMethod and apparatus for drying substratesAPPLIED MATERIALS INC·Filed 1997·Granted Mar 23, 1999·535 cites·22 claims
- 0292US7718011B2Apparatus for cleaning and drying substratesAPPLIED MATERIALS INC·Filed 2007·Granted May 18, 2010·17 cites·8 claims
- 0392US7513062B2Single wafer dryer and drying methodsAPPLIED MATERIALS INC·Filed 2005·Granted Apr 7, 2009·23 cites·13 claims
- 0492US6280299B1Combined slurry dispenser and rinse armAPPLIED MATERIALS INC·Filed 2000·Granted Aug 28, 2001·54 cites·25 claims
- 0590US6345630B2Method and apparatus for cleaning the edge of a thin discAPPLIED MATERIALS INC·Filed 2000·Granted Feb 12, 2002·43 cites·16 claims
- 0690US6139406ACombined slurry dispenser and rinse arm and method of operationAPPLIED MATERIALS INC·Filed 1997·Granted Oct 31, 2000·103 cites·50 claims
- 0789US6955516B2Single wafer dryer and drying methodsAPPLIED MATERIALS INC·Filed 2002·Granted Oct 18, 2005·33 cites·20 claims
- 0887US7980255B2Single wafer dryer and drying methodsAPPLIED MATERIALS INC·Filed 2007·Granted Jul 19, 2011·10 cites·18 claims
- 0987US6746544B2Apparatus for cleaning and drying substratesAPPLIED MATERIALS INC·Filed 2001·Granted Jun 8, 2004·32 cites·22 claims
- 1086US6468362B1Method and apparatus for cleaning/drying hydrophobic wafersAPPLIED MATERIALS INC·Filed 2000·Granted Oct 22, 2002·38 cites·9 claims
- 1186US6464799B1Method for managing a fluid level associated with a substrate processing tankAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·30 cites·29 claims
- 1286US6082948AControlled environment enclosure and mechanical interfaceAPPLIED MATERIALS INC·Filed 1994·Granted Jul 4, 2000·76 cites·15 claims
- 1385US7252098B2Apparatus for cleaning and drying substratesAPPLIED MATERIALS INC·Filed 2003·Granted Aug 7, 2007·26 cites·15 claims
- 1485US6328814B1Apparatus for cleaning and drying substratesAPPLIED MATERIALS INC·Filed 1999·Granted Dec 11, 2001·60 cites·7 claims
- 1585US6311702B1Megasonic cleanerAPPLIED MATERIALS INC·Filed 1998·Granted Nov 6, 2001·75 cites·7 claims
- 1685US6202658B1Method and apparatus for cleaning the edge of a thin discAPPLIED MATERIALS INC·Filed 1998·Granted Mar 20, 2001·66 cites·16 claims
- 1783US5047648AMethod and apparatus for detecting particles in ion implantation machinesAPPLIED MATERIALS INC·Filed 1990·Granted Sep 10, 1991·41 cites·12 claims
- 1881US5697750AControlled environment enclosure and mechanical interfaceAPPLIED MATERIALS INC·Filed 1995·Granted Dec 16, 1997·50 cites·10 claims
- 1979US6241588B1Cavitational polishing pad conditionerAPPLIED MATERIALS INC·Filed 2000·Granted Jun 5, 2001·15 cites·17 claims
- 2077US6027574AMethod of drying a substrate by lowering a fluid surface levelAPPLIED MATERIALS INC·Filed 1998·Granted Feb 22, 2000·43 cites·42 claims
- 2176US5083865AParticle monitor system and methodAPPLIED MATERIALS INC·Filed 1990·Granted Jan 28, 1992·44 cites·13 claims
- 2273US6332470B1Aerosol substrate cleanerFiled 1997·Granted Dec 25, 2001·43 cites·26 claims
- 2373US6220941B1Method of post CMP defect stability improvementAPPLIED MATERIALS INC·Filed 1998·Granted Apr 24, 2001·35 cites·21 claims
- 2471US6358124B1Pad conditioner cleaning apparatusAPPLIED MATERIALS INC·Filed 1998·Granted Mar 19, 2002·44 cites·34 claims
- 2568US6352403B1Controlled environment enclosure and mechanical interfaceAPPLIED MATERIALS INC·Filed 1999·Granted Mar 5, 2002·26 cites·14 claims
- 2668US6220259B1Tank design for sonic wafer cleaningAPPLIED MATERIALS INC·Filed 1998·Granted Apr 24, 2001·32 cites·16 claims
- 2767US6412499B1Continuous cleaning megasonic tank with reduced duty cycle transducersAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·9 cites·8 claims
- 2866US6148833AContinuous cleaning megasonic tank with reduced duty cycle transducersAPPLIED MATERIALS INC·Filed 1998·Granted Nov 21, 2000·27 cites·30 claims
- 2966US6119708AMethod and apparatus for cleaning the edge of a thin discAPPLIED MATERIALS INC·Filed 1998·Granted Sep 19, 2000·26 cites·14 claims
- 3063US5957754ACavitational polishing pad conditionerAPPLIED MATERIALS INC·Filed 1997·Granted Sep 28, 1999·18 cites·12 claims
- 3161US6276371B1Method and apparatus for cleaning the edge of a thin discAPPLIED MATERIALS INC·Filed 2000·Granted Aug 21, 2001·6 cites·10 claims
- 3261US6218306B1Method of chemical mechanical polishing a metal layerAPPLIED MATERIALS INC·Filed 1998·Granted Apr 17, 2001·31 cites·13 claims
- 3361US5565985AParticle monitoring sensorAPPLIED MATERIALS INC·Filed 1995·Granted Oct 15, 1996·18 cites·10 claims
- 3458US2009241996A1Single wafer dryer and drying methodsACHKIRE YOUNES·Filed 2008·Application pending·0 cites
- 3557US6217430B1Pad conditioner cleaning apparatusAPPLIED MATERIALS INC·Filed 1998·Granted Apr 17, 2001·21 cites·18 claims
- 3657US2010006124A1Single wafer dryer and drying methodsAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3756US5463460AParticle monitoring sensorAPPLIED MATERIALS INC·Filed 1993·Granted Oct 31, 1995·14 cites·20 claims
- 3852US6460551B1Megasonic resonator for disk cleaning and method for use thereofAPPLIED MATERIALS INC·Filed 1999·Granted Oct 8, 2002·16 cites·16 claims
- 3952US6149505ACavitational polishing pad conditionerAPPLIED MATERIALS INC·Filed 1999·Granted Nov 21, 2000·11 cites·4 claims
- 4052US6011622AParticle monitoring systemAPPLIED MATERIALS INC·Filed 1997·Granted Jan 4, 2000·12 cites·28 claims
- 4152US2006260653A1Apparatus for cleaning and drying substratesAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 4251US2006174921A1Single wafer dryer and drying methodsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 4350US2005241684A1Single wafer dryer and drying methodsAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 4442US5287725ASurface volatile material detectorAPPLIED MATERIALS INC·Filed 1993·Granted Feb 22, 1994·11 cites·20 claims
- 4541US2003010364A1Apparatus for fluid control with a substrate processing tankFiled 2002·Application pending·0 cites
- 4640US2002189643A1Method and apparatus for cleaning/drying hydrophobic wafersFiled 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Boris Fishkin files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →