Inventor · disambiguated record
Timothy Dyer
Also filed as: DYER TIMOTHY · DYER TIMOTHY S · DYER TIMOTHY SCOTT
34 granted patents·9 pending applications·1,418 citations·filing 1996–2016
98Inventor score
Top patents by PatentIndex Score
43 records- 0197US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 0297US6108189AElectrostatic chuck having improved gas conduitsAPPLIED MATERIALS INC·Filed 1997·Granted Aug 22, 2000·255 cites·64 claims
- 0396US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 0496US6721162B2Electrostatic chuck having composite dielectric layer and method of manufactureAPPLIED MATERIALS INC·Filed 2002·Granted Apr 13, 2004·76 cites·20 claims
- 0595US6465051B1Method of operating high density plasma CVD reactor with combined inductive and capacitive couplingAPPLIED MATERIALS INC·Filed 1996·Granted Oct 15, 2002·221 cites·28 claims
- 0695US6447368B1Carriers with concentric balloons supporting a diaphragmSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 10, 2002·62 cites·13 claims
- 0794US6414834B1Dielectric covered electrostatic chuckAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·56 cites·34 claims
- 0894US5720818AConduits for flow of heat transfer fluid to the surface of an electrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Feb 24, 1998·150 cites·51 claims
- 0989US6288357B1Ion milling planarization of semiconductor workpiecesSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 11, 2001·47 cites·13 claims
- 1088US7366219B2Line narrowing moduleCYMER INC·Filed 2004·Granted Apr 29, 2008·20 cites·112 claims
- 1187US7193228B2EUV light source optical elementsCYMER INC·Filed 2004·Granted Mar 20, 2007·38 cites·74 claims
- 1287US6409580B1Rigid polishing pad conditioner for chemical mechanical polishing toolSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 25, 2002·38 cites·19 claims
- 1386US6540592B1Carrier head with reduced moment wear ringSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 1, 2003·29 cites·24 claims
- 1485US8742604B2Systems and methods for combined flow control and electricity generationDYER TIMOTHY·Filed 2012·Granted Jun 3, 2014·12 cites·22 claims
- 1584US6793565B1Orbiting indexable belt polishing station for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 21, 2004·23 cites·35 claims
- 1681US8893702B2Ductile mode machining methods for hard and brittle components of plasma processing apparatusesLAM RES CORP·Filed 2013·Granted Nov 25, 2014·6 cites·20 claims
- 1781US5904776AConduits for flow of heat transfer fluid to the surface of an electrostatic chuckAPPLIED MATERIALS INC·Filed 1997·Granted May 18, 1999·52 cites·12 claims
- 1878US6690706B2High rep-rate laser with improved electrodesCYMER INC·Filed 2002·Granted Feb 10, 2004·17 cites·30 claims
- 1974US6652366B2Dynamic slurry distribution control for CMPSPEEDFAM IPEC CORP·Filed 2001·Granted Nov 25, 2003·15 cites·12 claims
- 2069US6661826B2Laser chamber insulator with sealed electrode feedthroughCYMER INC·Filed 2002·Granted Dec 9, 2003·11 cites·20 claims
- 2168US7522650B2Gas discharge laser chamber improvementsCYMER INC·Filed 2004·Granted Apr 21, 2009·8 cites·64 claims
- 2267US6937635B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Aug 30, 2005·7 cites·16 claims
- 2359US7301980B2Halogen gas discharge laser electrodesCYMER INC·Filed 2004·Granted Nov 27, 2007·5 cites·82 claims
- 2457US2010097704A1Line narrowing moduleCYMER INC·Filed 2009·Application pending·0 cites
- 2556US7095774B2Cathodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Aug 22, 2006·3 cites·10 claims
- 2655US7132123B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Nov 7, 2006·3 cites·5 claims
- 2754US7851011B2Anodes for fluorine gas discharge lasersCYMER INC·Filed 2007·Granted Dec 14, 2010·0 cites·27 claims
- 2851US2007170378A1EUV light source optical elementsCYMER INC·Filed 2007·Application pending·0 cites
- 2950US7339973B2Electrodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Mar 4, 2008·2 cites·36 claims
- 3050US6209483B1Apparatus and method for removing silicon dioxide residues from CVD reactorsACCORD S E G·Filed 1999·Granted Apr 3, 2001·16 cites·1 claims
- 3149US7230965B2Anodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Jun 12, 2007·1 cites·28 claims
- 3248US5744400AApparatus and method for dry milling of non-planar features on a semiconductor surfaceACCORD SEMICONDUCTOR EQUIPMENT·Filed 1996·Granted Apr 28, 1998·17 cites·9 claims
- 3347US2008233403A1Method of Making Ceramic Reactor Components and Ceramic Reactor Component Made TherefromDYER TIMOTHY·Filed 2008·Application pending·0 cites
- 3445US10648148B2Sheet for use in ground worksDYER TIMOTHY·Filed 2016·Granted May 12, 2020·0 cites·16 claims
- 3544US6203417B1Chemical mechanical polishing tool components with improved corrosion resistanceSPEEDFAM IPEC CORP·Filed 1999·Granted Mar 20, 2001·10 cites·10 claims
- 3644US2004190215A1Electrostatic chuck having dielectric member with stacked layers and manufactureAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 3743US2010176313A1Extreme ultraviolet light sourceCYMER INC·Filed 2009·Application pending·0 cites
- 3842US7229343B2Orbiting indexable belt polishing station for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2004·Granted Jun 12, 2007·0 cites·17 claims
- 3942US5800623ASemiconductor wafer support platformACCORD SEG INC·Filed 1996·Granted Sep 1, 1998·12 cites·5 claims
- 4039US2002072307A1Apparatus and method for chemical mechanical planarization using a fixed-abrasive polishing padFiled 2000·Application pending·0 cites
- 4136US2002098784A1Abrasive free polishing in copper damascene applicationsFiled 2001·Application pending·0 cites
- 4236US2002154670A1Electric discharge laser with two-material electrodesFiled 2002·Application pending·0 cites
- 4334US2002077049A1Reinforced CMP carrier bladdersSPEEDFAM IPEC CORP·Filed 2000·Application pending·0 cites
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