US2010097704A1PendingUtilityA1
Line narrowing module
Est. expiryNov 30, 2024(expired)· nominal 20-yr term from priority
Inventors:J. Martin AlgotsRobert A. BergstedtWalter Dale GillespieVladimir KulgeykoWilliam N. PartloGerman E. RylovRichard L. SandstromBrian StrateTimothy Dyer
H01S 3/036H01S 3/08004H01S 3/1055G03F 7/70041H01S 3/08H01S 3/005H01S 3/2251G03F 7/70025H01S 3/097H01S 3/106H01S 3/08059H01S 3/22
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Claims
Abstract
An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
Claims
exact text as granted — not AI-modified1 . An apparatus comprising: a grating receiving light; a first prism moveable to coarsely select an angle of incidence of the light on the grating; and a second prism moveable to finely select an angle of incidence of the light on the grating.
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