Assignee
CYMER INC
US·377 granted patents·22 pending applications·18,273 citations·filing 1994–2013
Top patents by PatentIndex Score
399 records- 0199US7196342B2Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light sourceCYMER INC·Filed 2005·Granted Mar 27, 2007·284 cites·9 claims
- 0299US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0399US6549551B2Injection seeded laser with precise timing controlCYMER INC·Filed 2001·Granted Apr 15, 2003·186 cites·11 claims
- 0499US6067311AExcimer laser with pulse multiplierCYMER INC·Filed 1998·Granted May 23, 2000·224 cites·13 claims
- 0599US6005879APulse energy control for excimer laserCYMER INC·Filed 1998·Granted Dec 21, 1999·231 cites·13 claims
- 0699US5978394AWavelength system for an excimer laserCYMER INC·Filed 1998·Granted Nov 2, 1999·223 cites·13 claims
- 0798US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0898US7655925B2Gas management system for a laser-produced-plasma EUV light sourceCYMER INC·Filed 2007·Granted Feb 2, 2010·43 cites·20 claims
- 0998US7491954B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2006·Granted Feb 17, 2009·84 cites·60 claims
- 1098US7439530B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Oct 21, 2008·76 cites·44 claims
- 1198US7405416B2Method and apparatus for EUV plasma source target deliveryCYMER INC·Filed 2005·Granted Jul 29, 2008·118 cites·10 claims
- 1298US7372056B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2005·Granted May 13, 2008·109 cites·21 claims
- 1398US6690704B2Control system for a two chamber gas discharge laserCYMER INC·Filed 2002·Granted Feb 10, 2004·128 cites·38 claims
- 1498US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 1598US6566667B1Plasma focus light source with improved pulse power systemCYMER INC·Filed 2000·Granted May 20, 2003·185 cites·22 claims
- 1698US6535531B1Gas discharge laser with pulse multiplierCYMER INC·Filed 2001·Granted Mar 18, 2003·166 cites·9 claims
- 1798US6208675B1Blower assembly for a pulsed laser system incorporating ceramic bearingsCYMER INC·Filed 1998·Granted Mar 27, 2001·193 cites·25 claims
- 1898US6208674B1Laser chamber with fully integrated electrode feedthrough main insulatorCYMER INC·Filed 1999·Granted Mar 27, 2001·187 cites·24 claims
- 1998US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 2098US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 2198US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 2298US5856991AVery narrow band laserCYMER INC·Filed 1997·Granted Jan 5, 1999·198 cites·15 claims
- 2398US5852621APulse laser with pulse energy trimmerCYMER INC·Filed 1997·Granted Dec 22, 1998·196 cites·6 claims
- 2498US5771258AAerodynamic chamber design for high pulse repetition rate excimer lasersCYMER INC·Filed 1997·Granted Jun 23, 1998·187 cites·14 claims
- 2598US5763930APlasma focus high energy photon sourceCYMER INC·Filed 1997·Granted Jun 9, 1998·192 cites·6 claims
- 2698US5729562APulse power generating circuit with energy recoveryCYMER INC·Filed 1996·Granted Mar 17, 1998·241 cites·64 claims
- 2797US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 2897US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 2997US7643529B2Laser systemCYMER INC·Filed 2007·Granted Jan 5, 2010·35 cites·15 claims
- 3097US6972421B2Extreme ultraviolet light sourceCYMER INC·Filed 2003·Granted Dec 6, 2005·141 cites·78 claims
- 3197US6853653B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Feb 8, 2005·74 cites·32 claims
- 3297US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 3397US6721340B1Bandwidth control technique for a laserCYMER INC·Filed 2000·Granted Apr 13, 2004·114 cites·4 claims
- 3497US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 3597US6493374B1Smart laser with fast deformable gratingCYMER INC·Filed 2000·Granted Dec 10, 2002·90 cites·22 claims
- 3697US6477193B2Extreme repetition rate gas discharge laser with improved blower motorCYMER INC·Filed 2000·Granted Nov 5, 2002·155 cites·28 claims
- 3797US6414979B2Gas discharge laser with blade-dielectric electrodeCYMER INC·Filed 2001·Granted Jul 2, 2002·173 cites·17 claims
- 3897US6317447B1Electric discharge laser with acoustic chirp correctionCYMER INC·Filed 2000·Granted Nov 13, 2001·108 cites·9 claims
- 3997US6240117B1Fluorine control system with fluorine monitorCYMER INC·Filed 1998·Granted May 29, 2001·205 cites·39 claims
- 4097US6192064B1Narrow band laser with fine wavelength controlCYMER INC·Filed 1999·Granted Feb 20, 2001·258 cites·19 claims
- 4197US6094448AGrating assembly with bi-directional bandwidth controlCYMER INC·Filed 1999·Granted Jul 25, 2000·194 cites·8 claims
- 4297US6016325AMagnetic modulator voltage and temperature timing compensation circuitCYMER INC·Filed 1998·Granted Jan 18, 2000·179 cites·11 claims
- 4396US8680495B1Extreme ultraviolet light sourceCYMER INC·Filed 2013·Granted Mar 25, 2014·17 cites·18 claims
- 4496US7920616B2Laser systemCYMER INC·Filed 2007·Granted Apr 5, 2011·32 cites·17 claims
- 4596US7899095B2Laser lithography system with improved bandwidth controlCYMER INC·Filed 2008·Granted Mar 1, 2011·23 cites·20 claims
- 4696US7822092B2Laser systemCYMER INC·Filed 2007·Granted Oct 26, 2010·37 cites·15 claims
- 4796US7715459B2Laser systemCYMER INC·Filed 2007·Granted May 11, 2010·36 cites·30 claims
- 4896US7368741B2Extreme ultraviolet light sourceCYMER INC·Filed 2005·Granted May 6, 2008·65 cites·78 claims
- 4996US7164144B2EUV light sourceCYMER INC·Filed 2004·Granted Jan 16, 2007·113 cites·49 claims
- 5096US7154928B2Laser output beam wavefront splitter for bandwidth spectrum controlCYMER INC·Filed 2004·Granted Dec 26, 2006·62 cites·64 claims
Showing the top 50 of 399 patent records by PatentIndex Score.
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