Assignee
SPEEDFAM IPEC CORP
US·147 granted patents·7 pending applications·5,623 citations·filing 1996–2005
Top patents by PatentIndex Score
154 records- 0198US7140956B1Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2005·Granted Nov 28, 2006·67 cites·7 claims
- 0297US6736952B2Method and apparatus for electrochemical planarization of a workpieceSPEEDFAM IPEC CORP·Filed 2001·Granted May 18, 2004·155 cites·74 claims
- 0397US6676482B2Learning method and apparatus for predictive determination of endpoint during chemical mechanical planarization using sparse samplingSPEEDFAM IPEC CORP·Filed 2001·Granted Jan 13, 2004·83 cites·8 claims
- 0497US6390905B1Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·137 cites·13 claims
- 0596US6659850B2Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work pieceSPEEDFAM IPEC CORP·Filed 2002·Granted Dec 9, 2003·97 cites·21 claims
- 0696US6143155AMethod for simultaneous non-contact electrochemical plating and planarizing of semiconductor wafers using a bipiolar electrode assemblySPEEDFAM IPEC CORP·Filed 1998·Granted Nov 7, 2000·265 cites·26 claims
- 0796US6056632ASemiconductor wafer polishing apparatus with a variable polishing force wafer carrier headSPEEDFAM IPEC CORP·Filed 1998·Granted May 2, 2000·202 cites·23 claims
- 0896US5950327AMethods and apparatus for cleaning and drying wafersSPEEDFAM IPEC CORP·Filed 1996·Granted Sep 14, 1999·418 cites·41 claims
- 0995US6447368B1Carriers with concentric balloons supporting a diaphragmSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 10, 2002·62 cites·13 claims
- 1095US6106662AMethod and apparatus for endpoint detection for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 1998·Granted Aug 22, 2000·197 cites·35 claims
- 1194US6515493B1Method and apparatus for in-situ endpoint detection using electrical sensorsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 4, 2003·56 cites·19 claims
- 1294US6491569B2Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMPSPEEDFAM IPEC CORP·Filed 2001·Granted Dec 10, 2002·55 cites·16 claims
- 1394US6361646B1Method and apparatus for endpoint detection for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 1999·Granted Mar 26, 2002·185 cites·12 claims
- 1493US6520839B1Load and unload station for semiconductor wafersSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 18, 2003·51 cites·25 claims
- 1593US6464855B1Method and apparatus for electrochemical planarization of a workpieceSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 15, 2002·74 cites·27 claims
- 1693US6354927B1Micro-adjustable wafer retaining apparatusSPEEDFAM IPEC CORP·Filed 2000·Granted Mar 12, 2002·53 cites·11 claims
- 1793US6264532B1Ultrasonic methods and apparatus for the in-situ detection of workpiece lossSPEEDFAM IPEC CORP·Filed 2000·Granted Jul 24, 2001·45 cites·11 claims
- 1892US6447379B1Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method thereforSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 10, 2002·52 cites·10 claims
- 1992US6371838B1Polishing pad conditioning device with cutting elementsSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 16, 2002·107 cites·28 claims
- 2092US6227946B1Robot assisted method of polishing, cleaning and drying workpiecesSPEEDFAM IPEC CORP·Filed 2000·Granted May 8, 2001·42 cites·14 claims
- 2192US6021791AMethod and apparatus for immersion cleaning of semiconductor devicesSPEEDFAM IPEC CORP·Filed 1998·Granted Feb 8, 2000·115 cites·35 claims
- 2291US6685537B1Polishing pad window for a chemical mechanical polishing toolSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 3, 2004·56 cites·28 claims
- 2391US6618130B2Method and apparatus for optical endpoint detection during chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2001·Granted Sep 9, 2003·75 cites·17 claims
- 2491US6612903B2Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2002·Granted Sep 2, 2003·40 cites·16 claims
- 2589US6802955B2Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surfaceSPEEDFAM IPEC CORP·Filed 2002·Granted Oct 12, 2004·43 cites·31 claims
- 2689US6288357B1Ion milling planarization of semiconductor workpiecesSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 11, 2001·47 cites·13 claims
- 2787US6572755B2Method and apparatus for electrochemically depositing a material onto a workpiece surfaceSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 3, 2003·33 cites·79 claims
- 2887US6544103B1Method to determine optimum geometry of a multizone carrierSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 8, 2003·30 cites·8 claims
- 2987US6409580B1Rigid polishing pad conditioner for chemical mechanical polishing toolSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 25, 2002·38 cites·19 claims
- 3087US6363623B1Apparatus and method for spinning a work pieceSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 2, 2002·47 cites·24 claims
- 3187US6113468AWafer planarization carrier having floating pad load ringSPEEDFAM IPEC CORP·Filed 1999·Granted Sep 5, 2000·75 cites·14 claims
- 3286US6549279B2Method and apparatus for optical endpoint calibration in CMPSPEEDFAM IPEC CORP·Filed 2001·Granted Apr 15, 2003·37 cites·33 claims
- 3386US6540592B1Carrier head with reduced moment wear ringSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 1, 2003·29 cites·24 claims
- 3486US6368183B1Wafer cleaning apparatus and associated wafer processing methodsSPEEDFAM IPEC CORP·Filed 2000·Granted Apr 9, 2002·39 cites·21 claims
- 3586US6227950B1Dual purpose handoff station for workpiece polishing machineSPEEDFAM IPEC CORP·Filed 1999·Granted May 8, 2001·67 cites·17 claims
- 3686US6213853B1Integral machine for polishing, cleaning, rinsing and drying workpiecesSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 10, 2001·58 cites·68 claims
- 3786US5961369AMethods for the in-process detection of workpieces with a monochromatic light sourceSPEEDFAM IPEC CORP·Filed 1998·Granted Oct 5, 1999·61 cites·10 claims
- 3885US6466642B1Methods and apparatus for the in-situ measurement of CMP process endpointSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 15, 2002·27 cites·15 claims
- 3984US6852007B1Robotic method of transferring workpieces to and from workstationsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 8, 2005·20 cites·7 claims
- 4084US6793565B1Orbiting indexable belt polishing station for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 21, 2004·23 cites·35 claims
- 4183US6586337B2Method and apparatus for endpoint detection during chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2001·Granted Jul 1, 2003·51 cites·15 claims
- 4283US6390891B1Method and apparatus for improved stability chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2000·Granted May 21, 2002·33 cites·20 claims
- 4382US7033464B2Apparatus for electrochemically depositing a material onto a workpiece surfaceSPEEDFAM IPEC CORP·Filed 2002·Granted Apr 25, 2006·23 cites·18 claims
- 4482US6582277B2Method for controlling a process in a multi-zonal apparatusSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 24, 2003·23 cites·23 claims
- 4582US6290584B1Workpiece carrier with segmented and floating retaining elementsSPEEDFAM IPEC CORP·Filed 1999·Granted Sep 18, 2001·58 cites·10 claims
- 4681US6350177B1Combined CMP and wafer cleaning apparatus and associated methodsSPEEDFAM IPEC CORP·Filed 2000·Granted Feb 26, 2002·17 cites·13 claims
- 4781US6264540B1Method and apparatus for disposable bladder carrier assemblySPEEDFAM IPEC CORP·Filed 2000·Granted Jul 24, 2001·22 cites·21 claims
- 4881US6045431AManufacture of thin-film magnetic headsSPEEDFAM IPEC CORP·Filed 1997·Granted Apr 4, 2000·52 cites·29 claims
- 4980US6923711B2Multizone carrier with process monitoring system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2001·Granted Aug 2, 2005·25 cites·22 claims
- 5080US6468131B1Method to mathematically characterize a multizone carrierSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 22, 2002·20 cites·12 claims
Showing the top 50 of 154 patent records by PatentIndex Score.
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