Inventor · disambiguated record
Keith Fox
Also filed as: FOX KEITH · FOX KEITH C
20 granted patents·8 pending applications·791 citations·filing 2004–2023
95Inventor score
Top patents by PatentIndex Score
28 records- 0196US8591659B1Plasma clean method for deposition chamberFANG ZHIYUAN·Filed 2009·Granted Nov 26, 2013·550 cites·16 claims
- 0296US8563414B1Methods for forming conductive carbon films by PECVDFOX KEITH·Filed 2010·Granted Oct 22, 2013·21 cites·18 claims
- 0394US8741394B2In-situ deposition of film stacksHAVERKAMP JASON·Filed 2010·Granted Jun 3, 2014·25 cites·12 claims
- 0493US8709551B2Smooth silicon-containing filmsFOX KEITH·Filed 2010·Granted Apr 29, 2014·25 cites·23 claims
- 0593US8173537B1Methods for reducing UV and dielectric diffusion barrier interactionCHATTOPADHYAY KAUSHIK·Filed 2007·Granted May 8, 2012·31 cites·21 claims
- 0692US8895415B1Tensile stressed doped amorphous siliconNOVELLUS SYSTEMS INC·Filed 2013·Granted Nov 25, 2014·14 cites·20 claims
- 0789US8124522B1Reducing UV and dielectric diffusion barrier interaction through the modulation of optical propertiesWU HUI-JUNG·Filed 2008·Granted Feb 28, 2012·31 cites·10 claims
- 0888US10214816B2PECVD apparatus for in-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 26, 2019·6 cites·9 claims
- 0988US7622400B1Method for improving mechanical properties of low dielectric constant materialsNOVELLUS SYSTEMS INC·Filed 2004·Granted Nov 24, 2009·42 cites·28 claims
- 1085US9028924B2In-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2012·Granted May 12, 2015·7 cites·14 claims
- 1183US12385138B2Plasma-enhanced deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2023·Granted Aug 12, 2025·0 cites·11 claims
- 1283US9117668B2PECVD deposition of smooth silicon filmsHOLLISTER ALICE·Filed 2012·Granted Aug 25, 2015·8 cites·22 claims
- 1380US10161034B2Rapid chamber clean using concurrent in-situ and remote plasma sourcesLAM RES CORP·Filed 2017·Granted Dec 25, 2018·1 cites·19 claims
- 1478US9388491B2Method for deposition of conformal films with catalysis assisted low temperature CVDNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 12, 2016·1 cites·5 claims
- 1577US11746420B2PECVD apparatus for in-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2018·Granted Sep 5, 2023·1 cites·13 claims
- 1675US12341002B2Low stress films for advanced semiconductor applicationsLAM RES CORP·Filed 2020·Granted Jun 24, 2025·1 cites·17 claims
- 1775US9165788B2Post-deposition soft annealingNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 20, 2015·4 cites·17 claims
- 1873US7695765B1Methods for producing low-stress carbon-doped oxide films with improved integration propertiesNOVELLUS SYSTEMS INC·Filed 2004·Granted Apr 13, 2010·22 cites·45 claims
- 1962US2009014952A1Interactive Role Playing GameFOX KEITH C·Filed 2008·Application pending·0 cites
- 2058US11278141B2Garment and hood hangerFox Laura·Filed 2018·Granted Mar 22, 2022·1 cites·12 claims
- 2156US2014053867A1Plasma clean method for deposition chamberNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 2251US2011272883A1Interactive Role Playing GameFOX KEITH C·Filed 2011·Application pending·0 cites
- 2348US2014167358A1Method for Providing Play Therapy Utilizing An Interactive Role Playing GameFOX KEITH C·Filed 2012·Application pending·0 cites
- 2445US2015325435A1Pecvd deposition of smooth silicon filmsNOVELLUS SYSTEMS INC·Filed 2015·Application pending·0 cites
- 2542US2022139730A1Multi-channel liquid delivery system for advanced semiconductor applicationsLAM RES CORP·Filed 2020·Application pending·0 cites
- 2640US2013157466A1Silicon nitride films for semiconductor device applicationsFOX KEITH·Filed 2013·Application pending·0 cites
- 2739US10358717B2Method for depositing high deposition rate, thick tetraethyl orthosilicate film with low compressive stress, high film stability and low shrinkageLAM RES CORP·Filed 2017·Granted Jul 23, 2019·0 cites·18 claims
- 2837US2012142172A1Pecvd deposition of smooth polysilicon filmsFOX KEITH·Filed 2011·Application pending·0 cites
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