Inventor · disambiguated record
Akiyuki Sugiyama
Also filed as: SUGIYAMA AKIYUKI
30 granted patents·3 pending applications·214 citations·filing 2005–2023
96Inventor score
Files withHITACHI HIGH TECH CORP18MATSUOKA RYOICHI4SUGIYAMA AKIYUKI4SUTANI TAKUMICHI3TOYODA YASUTAKA2
Top patents by PatentIndex Score
33 records- 0194US7923703B2Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 12, 2011·18 cites·13 claims
- 0294US7449689B2Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the methodHITACHI HIGH TECH CORP·Filed 2005·Granted Nov 11, 2008·23 cites·20 claims
- 0392US7518110B2Pattern measuring method and pattern measuring deviceHITACHI HIGH TECH CORP·Filed 2006·Granted Apr 14, 2009·13 cites·9 claims
- 0491US7732792B2Pattern measurement apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 8, 2010·23 cites·5 claims
- 0590US7507961B2Method and apparatus of pattern inspection and semiconductor inspection system using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 24, 2009·18 cites·23 claims
- 0689US8019161B2Method, device and computer program of length measurementHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 13, 2011·14 cites·18 claims
- 0789US7679055B2Pattern displacement measuring method and pattern measuring deviceHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 16, 2010·16 cites·4 claims
- 0887US8515153B2System and method of image processing, and scanning electron microscopeSUGIYAMA AKIYUKI·Filed 2011·Granted Aug 20, 2013·13 cites·18 claims
- 0984US8445871B2Pattern measurement apparatusMATSUOKA RYOICHI·Filed 2010·Granted May 21, 2013·6 cites·16 claims
- 1082US8577124B2Method and apparatus of pattern inspection and semiconductor inspection system using the sameTOYODA YASUTAKA·Filed 2012·Granted Nov 5, 2013·5 cites·10 claims
- 1181US8338804B2Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatusMOROKUMA HIDETOSHI·Filed 2011·Granted Dec 25, 2012·6 cites·15 claims
- 1281US8173962B2Pattern displacement measuring method and pattern measuring deviceSUTANI TAKUMICHI·Filed 2010·Granted May 8, 2012·6 cites·4 claims
- 1378US8115169B2Method and apparatus of pattern inspection and semiconductor inspection system using the sameTOYODA YASUTAKA·Filed 2009·Granted Feb 14, 2012·3 cites·7 claims
- 1475US8355562B2Pattern shape evaluation methodHITACHI HIGH TECH CORP·Filed 2008·Granted Jan 15, 2013·9 cites·19 claims
- 1574US8507856B2Pattern measuring method and pattern measuring deviceSUTANI TAKUMICHI·Filed 2012·Granted Aug 13, 2013·2 cites·8 claims
- 1673US8311314B2Pattern measuring method and pattern measuring deviceMATSUOKA RYOICHI·Filed 2009·Granted Nov 13, 2012·6 cites·9 claims
- 1773US7889909B2Pattern matching method and pattern matching programHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 15, 2011·6 cites·8 claims
- 1872US8094920B2System and method of image processing, and scanning electron microscopeSUGIYAMA AKIYUKI·Filed 2006·Granted Jan 10, 2012·8 cites·9 claims
- 1971US8788242B2Pattern measurement apparatusMATSUOKA RYOICHI·Filed 2010·Granted Jul 22, 2014·3 cites·4 claims
- 2069US12498337B2Measurement system and measurement methodHITACHI HIGH TECH CORP·Filed 2023·Granted Dec 16, 2025·0 cites·10 claims
- 2169US7925095B2Pattern matching method and computer program for executing pattern matchingHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 12, 2011·6 cites·15 claims
- 2269US7772554B2Charged particle systemHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 10, 2010·2 cites·11 claims
- 2364US8285056B2Method and apparatus for computing degree of matchingTAGUCHI JUNICHI·Filed 2009·Granted Oct 9, 2012·6 cites·21 claims
- 2463US10545018B2Pattern measurement device, and computer program for measuring patternHITACHI HIGH TECH CORP·Filed 2014·Granted Jan 28, 2020·1 cites·11 claims
- 2563US8867818B2Method of creating template for matching, as well as device for creating templateMATSUOKA RYOICHI·Filed 2010·Granted Oct 21, 2014·1 cites·12 claims
- 2660US2009200465A1Pattern measuring method and pattern measuring deviceSUTANI TAKUMICHI·Filed 2009·Application pending·0 cites
- 2758US10732512B2Image processor, method for generating pattern using self-organizing lithographic techniques and computer programHITACHI HIGH TECH CORP·Filed 2018·Granted Aug 4, 2020·0 cites·2 claims
- 2851US2015277237A1Image processor, method for generating pattern using self- organizing lithographic techniques and computer programHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 2948US2013117723A1Pattern shape evaluation method, pattern shape evaluation device, pattern shape evaluating data generation device and semiconductor shape evaluation system using the sameHITACHI HIGH TECH CORP·Filed 2012·Application pending·0 cites
- 3046US8244042B2Pattern matching method and computer program for executing pattern matchingSUGIYAMA AKIYUKI·Filed 2011·Granted Aug 14, 2012·0 cites·14 claims
- 3145US9804107B2Pattern measurement device and computer program for evaluating patterns based on centroids of the patternsHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 31, 2017·0 cites·11 claims
- 3242US7941008B2Pattern search methodHITACHI HIGH TECH CORP·Filed 2005·Granted May 10, 2011·0 cites·17 claims
- 3341US9704235B2Semiconductor inspection systemSUGIYAMA AKIYUKI·Filed 2012·Granted Jul 11, 2017·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →