Inventor · disambiguated record
Pekka Soininen
Also filed as: SOININEN PEKKA · SOININEN PEKKA J · SOININEN PEKKA T
37 granted patents·16 pending applications·4,716 citations·filing 1995–2020
98Inventor score
Top patents by PatentIndex Score
53 records- 0199US7156380B2Safe liquid source containersASM INT·Filed 2003·Granted Jan 2, 2007·506 cites·11 claims
- 0299US6482733B2Protective layers prior to alternating layer depositionASM MICROCHEMISTRY OY·Filed 2001·Granted Nov 19, 2002·406 cites·28 claims
- 0398US7971861B2Safe liquid source containersASM INT·Filed 2009·Granted Jul 5, 2011·43 cites·21 claims
- 0498US6686271B2Protective layers prior to alternating layer depositionASM INT·Filed 2002·Granted Feb 3, 2004·245 cites·65 claims
- 0597US6759325B2Sealing porous structuresASM MICROCHEMISTRY OY·Filed 2002·Granted Jul 6, 2004·169 cites·29 claims
- 0697US6447607B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Sep 10, 2002·143 cites·13 claims
- 0797US5711811AMethod and equipment for growing thin filmsMIKROKEMIA OY·Filed 1995·Granted Jan 27, 1998·1.1k cites·17 claims
- 0896US6630030B1Method and apparatus for growing thin filmsASM MICROCHEMISTRY LTD·Filed 2000·Granted Oct 7, 2003·430 cites·12 claims
- 0995US7497420B2Safe liquid source containersASM INT·Filed 2006·Granted Mar 3, 2009·18 cites·16 claims
- 1095US6861334B2Method of fabricating trench isolation structures for integrated circuits using atomic layer depositionASM INT·Filed 2001·Granted Mar 1, 2005·88 cites·5 claims
- 1195US5855680AApparatus for growing thin filmsNESTE OY·Filed 1995·Granted Jan 5, 1999·964 cites·16 claims
- 1294US6562140B1Apparatus for fabrication of thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted May 13, 2003·107 cites·30 claims
- 1393US6579374B2Apparatus for fabrication of thin filmsASM MICROCHEMISTRY OY·Filed 2001·Granted Jun 17, 2003·80 cites·75 claims
- 1492US6699783B2Method for controlling conformality with alternating layer depositionASM INT·Filed 2002·Granted Mar 2, 2004·47 cites·33 claims
- 1589US6881263B2Method of growing a thin film onto a substrateASM MICROCHEMISTRY OY·Filed 2001·Granted Apr 19, 2005·35 cites·36 claims
- 1688US6625138B2Data transmission method and a radio systemNOKIA CORP·Filed 2001·Granted Sep 23, 2003·48 cites·5 claims
- 1786US7018478B2Method of growing a thin film onto a substrateASM INT·Filed 2004·Granted Mar 28, 2006·23 cites·33 claims
- 1886US6783590B2Method of growing a thin film onto a substrateASM INT·Filed 2001·Granted Aug 31, 2004·23 cites·33 claims
- 1981US7037372B2Method of growing a thin film onto a substrateASM INT·Filed 2004·Granted May 2, 2006·17 cites·32 claims
- 2080US7215658B2Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh networkNOKIA CORP·Filed 2001·Granted May 8, 2007·26 cites·20 claims
- 2175US9803281B2Nozzle head and apparatusSOININEN PEKKA·Filed 2011·Granted Oct 31, 2017·2 cites·28 claims
- 2274US7833352B2Apparatus for fabrication of thin filmsASM INT·Filed 2003·Granted Nov 16, 2010·14 cites·36 claims
- 2371US9783887B2Apparatus and methodSOININEN PEKKA·Filed 2011·Granted Oct 10, 2017·1 cites·14 claims
- 2470US6694141B1Channel selection in a radio link systemNOKIA NETWORKS OY·Filed 1999·Granted Feb 17, 2004·74 cites·13 claims
- 2569US9683291B2Apparatus for processing surface of substrate and nozzle headBENEQ OY·Filed 2013·Granted Jun 20, 2017·1 cites·19 claims
- 2668US6594248B1Data transmission method and a radio systemNOKIA CORP·Filed 1999·Granted Jul 15, 2003·51 cites·22 claims
- 2761US6689210B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2002·Granted Feb 10, 2004·6 cites·10 claims
- 2861US2017362708A1Apparatus and methodBENEQ OY·Filed 2017·Application pending·0 cites
- 2961US2014335272A1Protective coating of silverBENEQ OY·Filed 2014·Application pending·0 cites
- 3054US12442081B2Nozzle head and apparatusBENEQ OY·Filed 2019·Granted Oct 14, 2025·0 cites·10 claims
- 3154US2010285205A1Coating methodBENEQ OY·Filed 2008·Application pending·0 cites
- 3254US2007287261A1Trench isolation structures for integrated circuitsASM INT·Filed 2007·Application pending·0 cites
- 3353US10590536B2Apparatus, method and reaction chamberBENEQ OY·Filed 2018·Granted Mar 17, 2020·0 cites·5 claims
- 3452US11214866B2Nozzle head and apparatusBENEQ OY·Filed 2020·Granted Jan 4, 2022·0 cites·7 claims
- 3552US8883258B2Protective coating of silverMAKELA MILJA·Filed 2007·Granted Nov 11, 2014·0 cites·14 claims
- 3652US7276774B2Trench isolation structures for integrated circuitsASM INT·Filed 2004·Granted Oct 2, 2007·2 cites·14 claims
- 3750US11702745B2Nozzle and nozzle headBENEQ OY·Filed 2018·Granted Jul 18, 2023·0 cites·9 claims
- 3850US2021214847A1Nozzle headBENEQ OY·Filed 2018·Application pending·0 cites
- 3950US2015004318A1Nozzle and nozzle headBENEQ OY·Filed 2013·Application pending·0 cites
- 4050US2009078203A1Hot sourceBENEQ OY·Filed 2007·Application pending·0 cites
- 4149US11041243B2Coating precursor nozzle and a nozzle headBENEQ OY·Filed 2016·Granted Jun 22, 2021·0 cites·20 claims
- 4249US2008093711A1Dielectric layers and methods of forming the sameASM INT·Filed 2007·Application pending·0 cites
- 4348US2005083852A1Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh networkFiled 2004·Application pending·0 cites
- 4447US2007054049A1Method of growing a thin film onto a substrateLINDFORS SVEN·Filed 2006·Application pending·0 cites
- 4546US2011265719A1Reaction chamberBENEQ OY·Filed 2010·Application pending·0 cites
- 4641US10385450B2Method of coating a substrate and an apparatusBENEQ OY·Filed 2017·Granted Aug 20, 2019·0 cites·13 claims
- 4741US2004087308A1Data transfer method in radio systemFiled 2002·Application pending·0 cites
- 4841US2017159179A1Nozzle Head, Apparatus and Method for Subjecting Surface of Substrate to Successive Surface ReactionsBENEQ OY·Filed 2015·Application pending·0 cites
- 4940US10167551B2Apparatus, method and reaction chamberSODERLUND MIKKO·Filed 2012·Granted Jan 1, 2019·0 cites·6 claims
- 5040US2011003125A1Glass product and a method for manufacturing a glass productBENQ OY·Filed 2008·Application pending·0 cites
Showing the top 50 of 53 patent records by PatentIndex Score.
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