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ASM INT
NL202 patents
Top patents by PatentIndex Score
US9368352B2Jun 14, 2016
Methods for forming doped silicon oxide thin films
ASM INT469 citations99
US9153441B2Oct 6, 2015
Methods for forming doped silicon oxide thin films
ASM INT473 citations99
US9112003B2Aug 18, 2015
Selective formation of metallic films on metallic surfaces
ASM INT93 citations99
US8679958B2Mar 25, 2014
Methods for forming doped silicon oxide thin films
ASM INT484 citations99
US7923382B2Apr 12, 2011
Method for forming roughened surface
ASM INT347 citations99
US7851019B2Dec 14, 2010
Method for controlling the sublimation of reactants
ASM INT551 citations99
US7824492B2Nov 2, 2010
Method of growing oxide thin films
ASM INT540 citations99
US7601223B2Oct 13, 2009
Showerhead assembly and ALD methods
ASM INT607 citations99
US7601225B2Oct 13, 2009
System for controlling the sublimation of reactants
ASM INT564 citations99
US7563715B2Jul 21, 2009
Method of producing thin films
ASM INT513 citations99
US7494927B2Feb 24, 2009
Method of growing electrical conductors
ASM INT127 citations99
US7312156B2Dec 25, 2007
Method and apparatus for supporting a semiconductor wafer during processing
ASM INT294 citations99
US7241677B2Jul 10, 2007
Process for producing integrated circuits including reduction using gaseous organic compounds
ASM INT119 citations99
US7156380B2Jan 2, 2007
Safe liquid source containers
ASM INT506 citations99
US7144809B2Dec 5, 2006
Production of elemental films using a boron-containing reducing agent
ASM INT450 citations99
US7045406B2May 16, 2006
Method of forming an electrode with adjusted work function
ASM INT155 citations99
US6933225B2Aug 23, 2005
Graded thin films
ASM INT147 citations99
US6902763B1Jun 7, 2005
Method for depositing nanolaminate thin films on sensitive surfaces
ASM INT191 citations99
US6887795B2May 3, 2005
Method of growing electrical conductors
ASM INT158 citations99
US6831315B2Dec 14, 2004
Conformal thin films over textured capacitor electrodes
ASM INT128 citations99
US6821889B2Nov 23, 2004
Production of elemental thin films using a boron-containing reducing agent
ASM INT349 citations99
US6800552B2Oct 5, 2004
Deposition of transition metal carbides
ASM INT91 citations99
US6703708B2Mar 9, 2004
Graded thin films
ASM INT123 citations99
US6686271B2Feb 3, 2004
Protective layers prior to alternating layer deposition
ASM INT245 citations99
US6613685B1Sep 2, 2003
Method for supporting a semiconductor wafer during processing
ASM INT379 citations99
US6461439B1Oct 8, 2002
Apparatus for supporting a semiconductor wafer during processing
ASM INT371 citations99
US6183565B1Feb 6, 2001
Method and apparatus for supporting a semiconductor wafer during processing
ASM INT502 citations99
US9257303B2Feb 9, 2016
Selective formation of metallic films on metallic surfaces
ASM INT82 citations98
US7971861B2Jul 5, 2011
Safe liquid source containers
ASM INT43 citations98
US7955979B2Jun 7, 2011
Method of growing electrical conductors
ASM INT88 citations98
US7927942B2Apr 19, 2011
Selective silicide process
ASM INT97 citations98
US7754621B2Jul 13, 2010
Process for producing zirconium oxide thin films
ASM INT615 citations98
US7682657B2Mar 23, 2010
Sequential chemical vapor deposition
ASM INT602 citations98
US7638170B2Dec 29, 2009
Low resistivity metal carbonitride thin film deposition by atomic layer deposition
ASM INT69 citations98
US7419903B2Sep 2, 2008
Thin films
ASM INT88 citations98
US7256375B2Aug 14, 2007
Susceptor plate for high temperature heat treatment
ASM INT388 citations98
US6955986B2Oct 18, 2005
Atomic layer deposition methods for forming a multi-layer adhesion-barrier layer for integrated circuits
ASM INT100 citations98
US6939579B2Sep 6, 2005
ALD reactor and method with controlled wall temperature
ASM INT372 citations98
US6876191B2Apr 5, 2005
Apparatus for treating wafers, provided with a sensor box
ASM INT419 citations98
US6861334B2Mar 1, 2005
Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition
ASM INT88 citations98
US6818517B1Nov 16, 2004
Methods of depositing two or more layers on a substrate in situ
ASM INT119 citations98
US6746240B2Jun 8, 2004
Process tube support sleeve with circumferential channels
ASM INT397 citations98
US6727169B1Apr 27, 2004
Method of making conformal lining layers for damascene metallization
ASM INT225 citations98
US6607602B1Aug 19, 2003
Device for processing semiconductor wafers
ASM INT349 citations98
US6390753B1May 21, 2002
System for loading, processing and unloading substrates arranged on a carrier
ASM INT373 citations98
US6139239AOct 31, 2000
System for transferring wafers from cassettes to furnaces and method
ASM INT343 citations98
US7666773B2Feb 23, 2010
Selective deposition of noble metal thin films
ASM INT48 citations97
US7410666B2Aug 12, 2008
Metal nitride carbide deposition by ALD
ASM INT503 citations97
US7067407B2Jun 27, 2006
Method of growing electrical conductors
ASM INT165 citations97
US6986914B2Jan 17, 2006
Metal nitride deposition by ALD with reduction pulse
ASM INT503 citations97
Showing the top 50 of 202 patents by PatentIndex Score.