Assignee
ASM MICROCHEMISTRY OY
US·19 granted patents·5,328 citations·filing 2000–2003
Top patents by PatentIndex Score
19 records- 0199US6534395B2Method of forming graded thin films using alternating pulses of vapor phase reactantsASM MICROCHEMISTRY OY·Filed 2001·Granted Mar 18, 2003·1.3k cites·33 claims
- 0299US6482733B2Protective layers prior to alternating layer depositionASM MICROCHEMISTRY OY·Filed 2001·Granted Nov 19, 2002·406 cites·28 claims
- 0399US6482740B2Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOHASM MICROCHEMISTRY OY·Filed 2001·Granted Nov 19, 2002·562 cites·26 claims
- 0499US6482262B1Deposition of transition metal carbidesASM MICROCHEMISTRY OY·Filed 2000·Granted Nov 19, 2002·328 cites·29 claims
- 0599US6475276B1Production of elemental thin films using a boron-containing reducing agentASM MICROCHEMISTRY OY·Filed 2000·Granted Nov 5, 2002·864 cites·40 claims
- 0698US6599572B2Process for growing metalloid thin films utilizing boron-containing reducing agentsASM MICROCHEMISTRY OY·Filed 2001·Granted Jul 29, 2003·233 cites·10 claims
- 0798US6548424B2Process for producing oxide thin filmsASM MICROCHEMISTRY OY·Filed 2001·Granted Apr 15, 2003·285 cites·23 claims
- 0897US6759325B2Sealing porous structuresASM MICROCHEMISTRY OY·Filed 2002·Granted Jul 6, 2004·169 cites·29 claims
- 0997US6632279B1Method for growing thin oxide filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Oct 14, 2003·314 cites·7 claims
- 1097US6447607B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Sep 10, 2002·143 cites·13 claims
- 1196US6777353B2Process for producing oxide thin filmsASM MICROCHEMISTRY OY·Filed 2003·Granted Aug 17, 2004·129 cites·7 claims
- 1296US6551406B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Apr 22, 2003·163 cites·20 claims
- 1396US6492283B2Method of forming ultrathin oxide layerASM MICROCHEMISTRY OY·Filed 2001·Granted Dec 10, 2002·124 cites·37 claims
- 1494US6562140B1Apparatus for fabrication of thin filmsASM MICROCHEMISTRY OY·Filed 2000·Granted May 13, 2003·107 cites·30 claims
- 1593US6579374B2Apparatus for fabrication of thin filmsASM MICROCHEMISTRY OY·Filed 2001·Granted Jun 17, 2003·80 cites·75 claims
- 1689US6881263B2Method of growing a thin film onto a substrateASM MICROCHEMISTRY OY·Filed 2001·Granted Apr 19, 2005·35 cites·36 claims
- 1786US6506352B1Method for removing substances from gasesASM MICROCHEMISTRY OY·Filed 2000·Granted Jan 14, 2003·39 cites·16 claims
- 1881US6699524B2Method and apparatus for feeding gas phase reactant into a reaction chamberASM MICROCHEMISTRY OY·Filed 2001·Granted Mar 2, 2004·26 cites·34 claims
- 1961US6689210B2Apparatus for growing thin filmsASM MICROCHEMISTRY OY·Filed 2002·Granted Feb 10, 2004·6 cites·10 claims
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