Inventor · disambiguated record
Steven V. Sansoni
Also filed as: SANSONI STEVEN · SANSONI STEVEN V · SANSONI STEVEN VICTOR
33 granted patents·4 pending applications·792 citations·filing 1997–2023
97Inventor score
Top patents by PatentIndex Score
37 records- 0196US8390980B2Electrostatic chuck assemblySANSONI STEVEN V·Filed 2009·Granted Mar 5, 2013·187 cites·8 claims
- 0294USD933725SDeposition ring for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Oct 19, 2021·52 cites·1 claims
- 0394USD893441SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2019·Granted Aug 18, 2020·68 cites·1 claims
- 0494USD891382SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jul 28, 2020·55 cites·1 claims
- 0594US8559159B2Electrostatic chuck and methods of use thereofROY SHAMBHU N·Filed 2011·Granted Oct 15, 2013·21 cites·20 claims
- 0694US7589950B2Detachable electrostatic chuck having sealing assemblyAPPLIED MATERIALS INC·Filed 2006·Granted Sep 15, 2009·69 cites·38 claims
- 0792US9425076B2Substrate transfer robot end effectorAPPLIED MATERIALS INC·Filed 2014·Granted Aug 23, 2016·14 cites·18 claims
- 0892US8971009B2Electrostatic chuck with temperature controlAPPLIED MATERIALS INC·Filed 2012·Granted Mar 3, 2015·13 cites·20 claims
- 0990USD947914SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·14 cites·1 claims
- 1090US6469283B1Method and apparatus for reducing thermal gradients within a substrate supportAPPLIED MATERIALS INC·Filed 1999·Granted Oct 22, 2002·112 cites·16 claims
- 1189US11555250B2Organic contamination free surface machiningAPPLIED MATERIALS INC·Filed 2021·Granted Jan 17, 2023·2 cites·20 claims
- 1288US9147592B2Linked vacuum processing tools and methods of using the sameAPPLIED MATERIALS INC·Filed 2013·Granted Sep 29, 2015·13 cites·20 claims
- 1387US11887878B2Detachable biasable electrostatic chuck for high temperature applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 30, 2024·2 cites·19 claims
- 1487USD960216SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2022·Granted Aug 9, 2022·10 cites·1 claims
- 1587US9508584B2In-situ removable electrostatic chuckAPPLIED MATERIALS INC·Filed 2014·Granted Nov 29, 2016·6 cites·20 claims
- 1686USD420022SElectrostatic chuck with improved spacing and charge migration reduction maskAPPLIED MATERIALS INC·Filed 1997·Granted Feb 1, 2000·31 cites·1 claims
- 1782US9779971B2Methods and apparatus for rapidly cooling a substrateAPPLIED MATERIALS INC·Filed 2014·Granted Oct 3, 2017·4 cites·15 claims
- 1882US9608549B2Electrostatic chuckAPPLIED MATERIALS INC·Filed 2012·Granted Mar 28, 2017·4 cites·19 claims
- 1980US9773692B2In-situ removable electrostatic chuckAPPLIED MATERIALS INC·Filed 2016·Granted Sep 26, 2017·2 cites·20 claims
- 2079USD942516SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Feb 1, 2022·17 cites·1 claims
- 2176US10704147B2Process kit design for in-chamber heater and wafer rotating mechanismAPPLIED MATERIALS INC·Filed 2017·Granted Jul 7, 2020·2 cites·20 claims
- 2276US10431489B2Substrate support apparatus having reduced substrate particle generationAPPLIED MATERIALS INC·Filed 2014·Granted Oct 1, 2019·3 cites·20 claims
- 2376USD407073SElectrostatic chuck with improved spacing and charge migration reduction maskAPPLIED MATERIALS INC·Filed 1997·Granted Mar 23, 1999·20 cites·1 claims
- 2474US5886865AMethod and apparatus for predicting failure of an eletrostatic chuckAPPLIED MATERIALS INC·Filed 1998·Granted Mar 23, 1999·43 cites·21 claims
- 2573US10312127B2Compliant robot blade for defect reductionAPPLIED MATERIALS INC·Filed 2014·Granted Jun 4, 2019·2 cites·13 claims
- 2673US10312116B2Methods and apparatus for rapidly cooling a substrateAPPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·1 cites·20 claims
- 2772US11932950B2Organic contamination free surface machiningAPPLIED MATERIALS INC·Filed 2023·Granted Mar 19, 2024·0 cites·20 claims
- 2865USD420023SElectrostatic chuck with improved spacing mask and workpiece detection deviceAPPLIED MATERIALS INC·Filed 1999·Granted Feb 1, 2000·13 cites·1 claims
- 2963USD406852SElectrostatic chuck with improved spacing mask and workpiece detection deviceAPPLIED MATERIALS INC·Filed 1997·Granted Mar 16, 1999·12 cites·1 claims
- 3059US11348823B2Compliant robot blade for substrate support and transferAPPLIED MATERIALS INC·Filed 2019·Granted May 31, 2022·0 cites·8 claims
- 3155US2010065216A1Ring assembly for substrate processing chamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3252US11414740B2Processing system for forming layersAPPLIED MATERIALS INC·Filed 2020·Granted Aug 16, 2022·0 cites·22 claims
- 3351US11047039B2Substrate carrier having hard maskAPPLIED MATERIALS INC·Filed 2018·Granted Jun 29, 2021·0 cites·20 claims
- 3448US2007283884A1Ring assembly for substrate processing chamberAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 3546US11170982B2Methods and apparatus for producing low angle depositionsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 9, 2021·0 cites·20 claims
- 3645US2021398824A1Batch wafer degas chamber and integration into factory interface and vacuum-based mainframeAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3744US2008101912A1Deposition analysis for robot motion correctionMARTIN TODD W·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Steven V. Sansoni files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →