USD406852SExpiredUtility

Electrostatic chuck with improved spacing mask and workpiece detection device

63
Assignee: APPLIED MATERIALS INCPriority: Nov 14, 1997Filed: Nov 14, 1997Granted: Mar 16, 1999
Est. expiryNov 14, 2017(expired)· nominal 20-yr term from priority
Inventors:Vincent E. BurkhartAllen FlaniganSteven V. Sansoni
63
PatentIndex Score
12
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for an electrostatic chuck with improved spacing mask and workpiece detection device, as shown.

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