Inventor · disambiguated record
Dan Wack
Also filed as: WACK DAN
38 granted patents·6 pending applications·2,612 citations·filing 2001–2020
99Inventor score
Top patents by PatentIndex Score
44 records- 0199US6633831B2Methods and systems for determining a critical dimension and a thin film characteristic of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Oct 14, 2003·362 cites·82 claims
- 0298US6891627B1Methods and systems for determining a critical dimension and overlay of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted May 10, 2005·192 cites·100 claims
- 0398US6694284B1Methods and systems for determining at least four properties of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Feb 17, 2004·211 cites·61 claims
- 0497US8330281B2Overlay marks, methods of overlay mark design and methods of overlay measurementsGHINOVKER MARK·Filed 2007·Granted Dec 11, 2012·43 cites·9 claims
- 0597US8179530B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2010·Granted May 15, 2012·143 cites·24 claims
- 0697US7317824B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR TECH CORP·Filed 2006·Granted Jan 8, 2008·22 cites·60 claims
- 0797US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0897US6812045B1Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantationKLA TENCOR INC·Filed 2001·Granted Nov 2, 2004·97 cites·52 claims
- 0997US6673637B2Methods and systems for determining a presence of macro defects and overlay of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Jan 6, 2004·120 cites·83 claims
- 1096US7751046B2Methods and systems for determining a critical dimension and overlay of a specimenKLA TENCOR TECH CORP·Filed 2003·Granted Jul 6, 2010·79 cites·13 claims
- 1196US7139083B2Methods and systems for determining a composition and a thickness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Nov 21, 2006·68 cites·62 claims
- 1296US6917433B2Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch processKLA TENCOR TECH CORP·Filed 2001·Granted Jul 12, 2005·61 cites·56 claims
- 1396US6806951B2Methods and systems for determining at least one characteristic of defects on at least two sides of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Oct 19, 2004·65 cites·74 claims
- 1495US8502979B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2012·Granted Aug 6, 2013·24 cites·8 claims
- 1595US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 1695US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 1795US7463369B2Systems and methods for measuring one or more characteristics of patterned features on a specimenKLA TENCOR TECH CORP·Filed 2006·Granted Dec 9, 2008·28 cites·20 claims
- 1895US7196782B2Methods and systems for determining a thin film characteristic and an electrical property of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Mar 27, 2007·56 cites·71 claims
- 1995US7006235B2Methods and systems for determining overlay and flatness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Feb 28, 2006·48 cites·71 claims
- 2095US6950196B2Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimenKLA TENCOR TECH CORP·Filed 2001·Granted Sep 27, 2005·50 cites·73 claims
- 2195US6919957B2Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Jul 19, 2005·110 cites·90 claims
- 2295US6917419B2Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Jul 12, 2005·51 cites·88 claims
- 2395US6891610B2Methods and systems for determining an implant characteristic and a presence of defects on a specimenKLA TENCOR TECH CORP·Filed 2001·Granted May 10, 2005·48 cites·87 claims
- 2495US6829559B2Methods and systems for determining a presence of macro and micro defects on a specimenK L A TENCOR TECHNOLOGIES·Filed 2001·Granted Dec 7, 2004·103 cites·80 claims
- 2594US7301634B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 27, 2007·35 cites·33 claims
- 2694US7106425B1Methods and systems for determining a presence of defects and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Sep 12, 2006·71 cites·86 claims
- 2794US7068833B1Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR CORP·Filed 2001·Granted Jun 27, 2006·81 cites·38 claims
- 2894US6946394B2Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition processKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Sep 20, 2005·43 cites·64 claims
- 2994US6782337B2Methods and systems for determining a critical dimension an a presence of defects on a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Aug 24, 2004·85 cites·83 claims
- 3093US9702693B2Apparatus for measuring overlay errorsKLA TENCOR CORP·Filed 2016·Granted Jul 11, 2017·6 cites·64 claims
- 3193US7879627B2Overlay marks and methods of manufacturing such marksKLA TENCOR TECH CORP·Filed 2009·Granted Feb 1, 2011·25 cites·12 claims
- 3291US6818459B2Methods and systems for determining a presence of macro defects and overlay of a specimenKLA TENCOR TECH CORP·Filed 2003·Granted Nov 16, 2004·48 cites·47 claims
- 3389US7274814B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR CORP·Filed 2006·Granted Sep 25, 2007·18 cites·27 claims
- 3487US7181057B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR TECH CORP·Filed 2002·Granted Feb 20, 2007·40 cites·25 claims
- 3584US7349090B2Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithographyKLA TENCOR TECH CORP·Filed 2001·Granted Mar 25, 2008·24 cites·9 claims
- 3682US7130029B2Methods and systems for determining an adhesion characteristic and a thickness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Oct 31, 2006·27 cites·67 claims
- 3780US7460981B2Methods and systems for determining a presence of macro and micro defects on a specimenKLA TENCOR TECH CORP·Filed 2004·Granted Dec 2, 2008·11 cites·79 claims
- 3857US2013314710A1Methods and Systems for Determining a Critical Dimension and Overlay of a SpecimenKLA TENCOR TECH CORP·Filed 2013·Application pending·0 cites
- 3954US2010235114A1Systems and methods for determining one or more characteristics of a specimen using radiation in the terahertz rangeKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 4052US11333487B2Common path mode fiber tip diffraction interferometer for wavefront measurementKLA CORP·Filed 2020·Granted May 17, 2022·0 cites·17 claims
- 4148US2012281275A1Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz RangeLEVY ADY·Filed 2012·Application pending·0 cites
- 4245US2004073398A1Methods and systems for determining a critical dimension and a thin film characteristic of a specimenKLA TENCOR INC·Filed 2003·Application pending·0 cites
- 4339US2006141376A1Methods and systems for controlling variation in dimensions of patterned features across a waferLEVY ADY·Filed 2005·Application pending·0 cites
- 4435US2010279213A1Methods and systems for controlling variation in dimensions of patterned features across a waferKLA TENCOR CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →