Assignee
LEVY ADY
US·2 granted patents·2 pending applications·167 citations·filing 2005–2012
Top patents by PatentIndex Score
4 records- 0197US8179530B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2010·Granted May 15, 2012·143 cites·24 claims
- 0295US8502979B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2012·Granted Aug 6, 2013·24 cites·8 claims
- 0348US2012281275A1Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz RangeLEVY ADY·Filed 2012·Application pending·0 cites
- 0439US2006141376A1Methods and systems for controlling variation in dimensions of patterned features across a waferLEVY ADY·Filed 2005·Application pending·0 cites
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