Inventor · disambiguated record
Chad Peterson
Also filed as: PETERSON CHAD
6 granted patents·3 pending applications·507 citations·filing 2001–2022
82Inventor score
Top patents by PatentIndex Score
9 records- 0198US7501355B2Decreasing the etch rate of silicon nitride by carbon additionAPPLIED MATERIALS INC·Filed 2006·Granted Mar 10, 2009·492 cites·6 claims
- 0295US11332827B2Gas distribution plate with high aspect ratio holes and a high hole densityAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·3 cites·20 claims
- 0376US7951730B2Decreasing the etch rate of silicon nitride by carbon additionAPPLIED MATERIALS INC·Filed 2009·Granted May 31, 2011·4 cites·14 claims
- 0476US2022380898A1Gas distribution plate with high aspect ratio holes and a high hole densityAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0566US7851384B2Method to mitigate impact of UV and E-beam exposure on semiconductor device film properties by use of a bilayer filmAPPLIED MATERIALS INC·Filed 2007·Granted Dec 14, 2010·2 cites·11 claims
- 0665US11111582B2Porous showerhead for a processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·0 cites·20 claims
- 0758US6667248B2Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layersAPPLIED MATERIALS INC·Filed 2001·Granted Dec 23, 2003·6 cites·22 claims
- 0843US2007202640A1Low-k spacer integration into CMOS transistorsAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0939US2006093756A1High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD filmsRAJAGOPALAN NAGARAJAN·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Chad Peterson files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →