Gas distribution plate with high aspect ratio holes and a high hole density

Abstract

A gas distribution plate for a showerhead assembly of a processing chamber may include at least a first plate and second plate. The first plate may include a first plurality holes each having a diameter of at least about 100 um. The second plate may include a second plurality of holes each having a diameter of at least about 100 um. Further, each of the first plurality of holes is aligned with a respective one of the second plurality of holes forming a plurality of interconnected holes. Each of the interconnected holes is isolated from each other interconnected holes.

1 - 20 . (cancelled) 
     
     
         21 . A gas distribution plate for a showerhead assembly, the gas distribution plate comprising:
 a first plate comprising a plurality of first holes, each first hole having a diameter of at least 100 um; and   a second plate coupled to the first plate, the second plate comprising a plurality of second holes, each second hole having a diameter of at least 100 um and aligned with a respective first hole of the plurality of first holes to form a plurality of interconnected holes, each interconnected hole isolated from each other interconnected hole of the plurality of interconnected holes;   wherein:
 the coupled first and second plates form a structure including a top surface and a bottom surface; and 
 each interconnected hole comprises:
 a first diameter at the top surface; 
 a transition from the first diameter to a smaller second diameter below the top surface, the transition including a step change in hole diameter; and 
 a frustoconical taper from the second diameter to a larger third diameter at the bottom surface. 
 
   
     
     
         22 . The gas distribution plate of  claim 21 , wherein the step change in hole diameter corresponds to an interface of a lower surface of the first plate and an upper surface of the second plate. 
     
     
         23 . The gas distribution plate of  claim 21 , wherein each interconnected hole further comprises a first portion of uniform diameter equal to the first diameter and extending from the top surface to the transition. 
     
     
         24 . The gas distribution plate of  claim 23 , wherein each interconnected hole further comprises a second portion of uniform diameter equal to the second diameter and extending from the transition to the frustoconical taper. 
     
     
         25 . The gas distribution plate of  claim 24 , further comprising an oxide coating applied to the coupled first and second plates. 
     
     
         26 . The gas distribution plate of  claim 21 , wherein each of the plurality of interconnected holes has an aspect ratio of at least 25 to 1. 
     
     
         27 . The gas distribution plate of  claim 21 , wherein each of the plurality of first holes and each of the plurality of second holes has a diameter of 100 um to about 600 um. 
     
     
         28 . The gas distribution plate of  claim 21 , wherein each of the first plate and the second plate has a thickness in a range of about 100 um to about 12.7 mm. 
     
     
         29 . The gas distribution plate of  claim 21 , wherein:
 the gas distribution plate further comprises a third plate coupled to the second plate;   the third plate comprises a plurality of third holes; and   each third hole of the plurality of third holes is aligned with a respective first hole of the plurality of first holes and a respective second hole of the plurality of second holes.   
     
     
         30 . The gas distribution plate of  claim 21 , wherein the first plate is bonded to the second plate using one of a diffusion bonding technique or a brazing technique. 
     
     
         31 . A gas distribution plate, comprising:
 a first plate comprising a plurality of first holes, each first hole having a diameter of at least 100 um; and   a second plate coupled to the first plate, the second plate comprising a plurality of second holes, each second hole having a diameter of at least 100 um and aligned with a respective first hole of the plurality of first holes to form a plurality of interconnected holes, each interconnected hole isolated from each other interconnected hole of the plurality of interconnected holes;   wherein:
 exposed surfaces of the coupled first and second plate comprise an oxide coating; 
 the coupled first and second plates form a structure including a top surface and a bottom surface; and 
 each interconnected hole comprises:
 a first diameter at the top surface; 
 a transition from the first diameter to a smaller second diameter below the top surface, the transition including a step change in hole diameter; and 
 a frustoconical taper from the second diameter to a larger third diameter at the bottom surface. 
 
   
     
     
         32 . The gas distribution plate of  claim 31 , wherein the step change in hole diameter corresponds to an interface of a lower surface of the first plate and an upper surface of the second plate. 
     
     
         33 . The gas distribution plate of  claim 31 , wherein each interconnected hole further comprises a first portion of uniform diameter equal to the first diameter and extending from the top surface to the transition. 
     
     
         34 . The gas distribution plate of  claim 33 , wherein each interconnected hole further comprises a second portion of uniform diameter equal to the second diameter and extending from the transition to the frustoconical taper. 
     
     
         35 . The gas distribution plate of  claim 31 , wherein the oxide coating comprises yttrium oxide. 
     
     
         36 . The gas distribution plate of  claim 31 , wherein each of the plurality of interconnected holes has an aspect ratio of at least 25 to 1. 
     
     
         37 . The gas distribution plate of  claim 31 , wherein each of the plurality of first holes and each of the plurality of second holes has a diameter of 100 um to about 600 um. 
     
     
         38 . The gas distribution plate of  claim 31 , wherein each of the first plate and the second plate has a thickness in a range of about 100 um to about 12.7 mm. 
     
     
         39 . The gas distribution plate of  claim 31 , wherein:
 the gas distribution plate further comprises a third plate coupled to the second plate;   the third plate comprises a plurality of third holes; and   each third hole of the plurality of third holes is aligned with a respective first hole of the plurality of first holes and a respective second hole of the plurality of second holes.   
     
     
         40 . A gas distribution plate, comprising:
 a first plate comprising a plurality of first holes, each first hole having a diameter of at least 100 um, the first plate having a thickness within a range of 100 um to about 12.7 mm; and   a second plate coupled to the first plate, the second plate having a thickness within a range of 100 um to about 12.7 mm, the second plate comprising a plurality of second holes, each second hole having a diameter of at least 100 um and aligned with a respective first hole of the plurality of first holes to form a plurality of interconnected holes, each interconnected hole isolated from each other interconnected hole of the plurality of interconnected holes;   wherein:
 exposed surfaces of the coupled first and second plate comprise an yttrium oxide or aluminum oxide coating; 
 the coupled first and second plates form a structure including a top surface and a bottom surface; and 
 each interconnected hole comprises:
 a first diameter at the top surface; 
 a transition from the first diameter to a smaller second diameter below the top surface, the transition including a step change in hole diameter; and 
 a frustoconical taper from the second diameter to a larger third diameter at the bottom surface.