Inventor · disambiguated record
Semyon L. Kats
Also filed as: KATS SEMYON · KATS SEMYON L
16 granted patents·4 pending applications·1,372 citations·filing 1997–2010
96Inventor score
Top patents by PatentIndex Score
20 records- 0197US6310755B1Electrostatic chuck having gas cavity and methodAPPLIED MATERIALS INC·Filed 1999·Granted Oct 30, 2001·325 cites·38 claims
- 0297US6108189AElectrostatic chuck having improved gas conduitsAPPLIED MATERIALS INC·Filed 1997·Granted Aug 22, 2000·255 cites·64 claims
- 0396US6721162B2Electrostatic chuck having composite dielectric layer and method of manufactureAPPLIED MATERIALS INC·Filed 2002·Granted Apr 13, 2004·76 cites·20 claims
- 0496US6538872B1Electrostatic chuck having heater and methodAPPLIED MATERIALS INC·Filed 2001·Granted Mar 25, 2003·123 cites·18 claims
- 0595US7672110B2Electrostatic chuck having textured contact surfaceAPPLIED MATERIALS INC·Filed 2005·Granted Mar 2, 2010·58 cites·20 claims
- 0695US7479464B2Low temperature aerosol deposition of a plasma resistive layerAPPLIED MATERIALS INC·Filed 2006·Granted Jan 20, 2009·45 cites·21 claims
- 0794US6490146B2Electrostatic chuck bonded to base with a bond layer and methodAPPLIED MATERIALS INC·Filed 2001·Granted Dec 3, 2002·88 cites·28 claims
- 0894US6414834B1Dielectric covered electrostatic chuckAPPLIED MATERIALS INC·Filed 2000·Granted Jul 2, 2002·56 cites·34 claims
- 0993US6490145B1Substrate support pedestalAPPLIED MATERIALS INC·Filed 2001·Granted Dec 3, 2002·86 cites·40 claims
- 1091US7221553B2Substrate support having heat transfer systemAPPLIED MATERIALS INC·Filed 2003·Granted May 22, 2007·49 cites·23 claims
- 1188US8279577B2Substrate support having fluid channelNGUYEN ANDREW·Filed 2010·Granted Oct 2, 2012·8 cites·32 claims
- 1285US6151203AConnectors for an electrostatic chuck and combination thereofAPPLIED MATERIALS INC·Filed 1998·Granted Nov 21, 2000·76 cites·20 claims
- 1384US7768765B2Substrate support having heat transfer systemAPPLIED MATERIALS INC·Filed 2007·Granted Aug 3, 2010·8 cites·32 claims
- 1483US8607731B2Cathode with inner and outer electrodes at different heightsHOFFMAN DANIEL J·Filed 2008·Granted Dec 17, 2013·8 cites·16 claims
- 1583US6462928B1Electrostatic chuck having improved electrical connector and methodAPPLIED MATERIALS INC·Filed 1999·Granted Oct 8, 2002·65 cites·13 claims
- 1676US6278600B1Electrostatic chuck with improved temperature control and puncture resistanceAPPLIED MATERIALS INC·Filed 1999·Granted Aug 21, 2001·46 cites·13 claims
- 1752US2010081284A1Methods and apparatus for improving flow uniformity in a process chamberAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1844US2004190215A1Electrostatic chuck having dielectric member with stacked layers and manufactureAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 1938US2004040664A1Cathode pedestal for a plasma etch reactorFiled 2003·Application pending·0 cites
- 2030US2002036881A1Electrostatic chuck having composite base and methodFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →