Inventor · disambiguated record
Tomoya Okubo
Also filed as: OKUBO TOMOYA
4 granted patents·6 pending applications·23 citations·filing 2004–2025
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0192US10541145B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Jan 21, 2020·8 cites·18 claims
- 0288US8124539B2Plasma processing apparatus, focus ring, and susceptorENDOH SHOSUKE·Filed 2010·Granted Feb 28, 2012·12 cites·14 claims
- 0366US7231321B2Method of resetting substrate processing apparatus, storage medium storing program for implementing the method, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Jun 12, 2007·3 cites·16 claims
- 0458US10985029B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Apr 20, 2021·0 cites·17 claims
- 0550US2008105203A1Component for substrate processing apparatus and method of forming film on the componentTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0647US2025285875A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0742US2012186985A1Component for substrate processing apparatus and method of forming film on the componentMITSUHASHI KOUJI·Filed 2012·Application pending·0 cites
- 0841US2004261946A1Plasma processing apparatus, focus ring, and susceptorTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0938US2004149214A1Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1035US2011183279A1Substrate heating apparatus, substrate heating method and substrate processing systemTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →