Assignee

MITSUHASHI KOUJI

JP·1 granted patent·1 pending application·9 citations·filing 2010–2012

Technology mixC23C2 H01J2 H10P2 C25D1 Y10T1

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2 records

0191US8449715B2Internal member of a plasma processing vesselMITSUHASHI KOUJI·Filed 2010·Granted May 28, 2013·9 cites·5 claims
0242US2012186985A1Component for substrate processing apparatus and method of forming film on the componentMITSUHASHI KOUJI·Filed 2012·Application pending·0 cites

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