Inventor · disambiguated record
Michael S. Adams
Also filed as: ADAMS MICHAEL S · ADAMS MICHAEL SHAWN
11 granted patents·2 pending applications·267 citations·filing 1997–2017
90Inventor score
Top patents by PatentIndex Score
13 records- 0194US8919563B2Methods and apparatus for large diameter wafer handlingENTEGRIS INC·Filed 2013·Granted Dec 30, 2014·16 cites·9 claims
- 0288US9312157B2Wafer carrierADAMS MICHAEL S·Filed 2012·Granted Apr 12, 2016·12 cites·16 claims
- 0387US5957292AWafer enclosure with doorFLUOROWARE INC·Filed 1997·Granted Sep 28, 1999·120 cites·10 claims
- 0483US6000550AWafer carrier box hingeFLUOROWARE INC·Filed 1998·Granted Dec 14, 1999·83 cites·16 claims
- 0568US10147624B2Wafer carrierENTEGRIS INC·Filed 2016·Granted Dec 4, 2018·1 cites·4 claims
- 0668US6902059B2Disk carrierENTEGRIS INC·Filed 2002·Granted Jun 7, 2005·13 cites·23 claims
- 0767USD673853SSubstrate shipper componentENTEGRIS INC·Filed 2012·Granted Jan 8, 2013·12 cites·1 claims
- 0861US9673075B2Wafer container with door guide and sealGREGERSON BARRY·Filed 2011·Granted Jun 6, 2017·1 cites·11 claims
- 0958US9592930B2Methods and apparatus for large diameter wafer handlingENTEGRIS INC·Filed 2014·Granted Mar 14, 2017·0 cites·17 claims
- 1056US6837375B2Disk carrier with spindleENTEGRIS INC·Filed 2002·Granted Jan 4, 2005·3 cites·13 claims
- 1156US2011005967A1Methods and apparatuses for large diameter wafer handlingENTEGRIS INC·Filed 2009·Application pending·0 cites
- 1251USD664851SSubstrate shipper componentBURNS JOHN·Filed 2010·Granted Aug 7, 2012·6 cites·1 claims
- 1338US2017236737A1Wafer container with door guide and sealENTEGRIS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →