Inventor · disambiguated record
Hironobu Hirata
Also filed as: HIRATA HIRONOBU
9 granted patents·11 pending applications·48 citations·filing 1997–2015
84Inventor score
Top patents by PatentIndex Score
20 records- 0183US8460470B2Vapor phase deposition apparatus and support tableHIRATA HIRONOBU·Filed 2011·Granted Jun 11, 2013·6 cites·4 claims
- 0276US7699604B2Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor deviceNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 20, 2010·5 cites·11 claims
- 0374US8632634B2Coating apparatus and coating methodMORIYAMA YOSHIKAZU·Filed 2009·Granted Jan 21, 2014·3 cites·6 claims
- 0472US8257499B2Vapor phase deposition apparatus and vapor phase deposition methodSUZUKI KUNIHIKO·Filed 2008·Granted Sep 4, 2012·1 cites·8 claims
- 0569US8597429B2Manufacturing apparatus and method for semiconductor deviceSUZUKI KUNIHIKO·Filed 2012·Granted Dec 3, 2013·2 cites·17 claims
- 0668US5984764AMethod of dressing an abrasive cloth and apparatus thereforTOSHIBA MACHINE CO LTD·Filed 1997·Granted Nov 16, 1999·30 cites·11 claims
- 0764US9552983B2Manufacturing method for semiconductor deviceNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jan 24, 2017·1 cites·9 claims
- 0855US2008311294A1Vapor-phase growth apparatus and vapor-phase growth methodITO HIDEKI·Filed 2008·Application pending·0 cites
- 0952US9090990B2Manufacturing apparatus and method for semiconductor deviceSUZUKI KUNIHIKO·Filed 2012·Granted Jul 28, 2015·0 cites·10 claims
- 1051US2009007841A1Vapor-phase growing apparatus and vapor-phase growing methodHIRATA HIRONOBU·Filed 2008·Application pending·0 cites
- 1150US2009139448A1Vapor phase growth apparatus ans vapor phase growth methodHIRATA HIRONOBU·Filed 2008·Application pending·0 cites
- 1249US2007204796A1Vapor phase deposition apparatus and support tableNUFLARE TECHNOLOGY INC·Filed 2007·Application pending·0 cites
- 1348US2010075509A1Manufacturing method and manufacturing apparatus for semiconductor deviceHIRATA HIRONOBU·Filed 2009·Application pending·0 cites
- 1448US2008308036A1Vapor-phase growth apparatus and vapor-phase growth methodITO HIDEKI·Filed 2008·Application pending·0 cites
- 1546US2009194018A1Apparatus and method for manufacturing epitaxial waferHIGASHI SHINYA·Filed 2009·Application pending·0 cites
- 1645US2007026148A1Vapor phase deposition apparatus and vapor phase deposition methodNUFLARE TECHNOLOGY INC·Filed 2006·Application pending·0 cites
- 1742US2009239362A1Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor deviceHIRATA HIRONOBU·Filed 2009·Application pending·0 cites
- 1841US2009068851A1Susceptor, manufacturing apparatus for semiconductor device and manufacturing method for semiconductor deviceHIRATA HIRONOBU·Filed 2008·Application pending·0 cites
- 1933US8795435B2Susceptor, coating apparatus and coating method using the susceptorHIGASHI SHINYA·Filed 2010·Granted Aug 5, 2014·0 cites·7 claims
- 2032US2011120366A1Susceptor, film forming apparatus and methodHIGASHI SHINYA·Filed 2010·Application pending·0 cites
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