Assignee
HIGASHI SHINYA
JP·2 granted patents·2 pending applications·3 citations·filing 2009–2010
Top patents by PatentIndex Score
4 records- 0170US8591993B2Epitaxial wafer manufacturing apparatus and manufacturing methodHIGASHI SHINYA·Filed 2009·Granted Nov 26, 2013·3 cites·12 claims
- 0246US2009194018A1Apparatus and method for manufacturing epitaxial waferHIGASHI SHINYA·Filed 2009·Application pending·0 cites
- 0333US8795435B2Susceptor, coating apparatus and coating method using the susceptorHIGASHI SHINYA·Filed 2010·Granted Aug 5, 2014·0 cites·7 claims
- 0432US2011120366A1Susceptor, film forming apparatus and methodHIGASHI SHINYA·Filed 2010·Application pending·0 cites
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