Inventor · disambiguated record
Takashi Ootagaki
Also filed as: OOTAGAKI TAKASHI
10 granted patents·2 pending applications·27 citations·filing 2014–2019
84Inventor score
Technology areasH10P
Files withSHIBAURA MECHATRONICS CORP12
Top patents by PatentIndex Score
12 records- 0190US9811096B2Liquid feeding device and substrate treating deviceSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Nov 7, 2017·9 cites·12 claims
- 0284US9553003B2Substrate processing device and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Jan 24, 2017·6 cites·9 claims
- 0379US10281210B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted May 7, 2019·4 cites·10 claims
- 0472US9795999B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Oct 24, 2017·2 cites·10 claims
- 0569US9972513B2Device and method for treating a substrate with hydrofluoric and nitric acidSHIBAURA MECHATRONICS CORP·Filed 2017·Granted May 15, 2018·1 cites·9 claims
- 0669US9607865B2Substrate processing device and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Mar 28, 2017·2 cites·7 claims
- 0768US10607863B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Mar 31, 2020·1 cites·11 claims
- 0863US9694371B2Substrate treatment apparatus and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Jul 4, 2017·1 cites·9 claims
- 0962US10325787B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Jun 18, 2019·1 cites·6 claims
- 1060US2020135504A1Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2019·Application pending·0 cites
- 1160US2020135505A1Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2019·Application pending·0 cites
- 1244US10276406B2Substrate processing device and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Apr 30, 2019·0 cites·12 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →