Assignee
SHIBAURA MECHATRONICS CORP
JP·138 granted patents·74 pending applications·554 citations·filing 1997–2025
Top patents by PatentIndex Score
212 records- 0190US12097541B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2021·Granted Sep 24, 2024·2 cites·20 claims
- 0290US9964358B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2016·Granted May 8, 2018·7 cites·10 claims
- 0390US9811096B2Liquid feeding device and substrate treating deviceSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Nov 7, 2017·9 cites·12 claims
- 0488US10026760B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Jul 17, 2018·8 cites·14 claims
- 0588US7301286B2Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc dischargeSHIBAURA MECHATRONICS CORP·Filed 2004·Granted Nov 27, 2007·33 cites·13 claims
- 0687US7403278B2Surface inspection apparatus and surface inspection methodSHIBAURA MECHATRONICS CORP·Filed 2007·Granted Jul 22, 2008·21 cites·6 claims
- 0784US9553003B2Substrate processing device and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Jan 24, 2017·6 cites·9 claims
- 0883US9679787B2Spin treatment apparatusSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Jun 13, 2017·5 cites·10 claims
- 0983US6416638B1Power supply unit for sputtering deviceSHIBAURA MECHATRONICS CORP·Filed 1998·Granted Jul 9, 2002·67 cites·23 claims
- 1082US11127574B2Plasma processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Sep 21, 2021·3 cites·14 claims
- 1182US10596828B2Tablet printing apparatus and tablet printing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Mar 24, 2020·1 cites·13 claims
- 1282US10486440B2Tablet printing apparatusSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Nov 26, 2019·2 cites·11 claims
- 1382US10460961B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Oct 29, 2019·3 cites·13 claims
- 1481US7075036B2Electronic part compression bonding apparatus and methodSHIBAURA MECHATRONICS CORP·Filed 2002·Granted Jul 11, 2006·33 cites·13 claims
- 1579US10281210B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted May 7, 2019·4 cites·10 claims
- 1679US10220640B2Tablet printing apparatusSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Mar 5, 2019·2 cites·12 claims
- 1779US9586391B2Bonding apparatus and method for manufacturing bonded substrateSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Mar 7, 2017·3 cites·16 claims
- 1877US7149341B2Wafer inspection apparatusSHIBAURA MECHATRONICS CORP·Filed 2003·Granted Dec 12, 2006·26 cites·15 claims
- 1976US11387082B2Plasma processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Jul 12, 2022·2 cites·16 claims
- 2076US10804121B2Substrate treatment apparatus, substrate treatment method, and method for manufacturing substrateSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Oct 13, 2020·2 cites·12 claims
- 2176US6299697B1Method and apparatus for processing substrateSHIBAURA MECHATRONICS CORP·Filed 2000·Granted Oct 9, 2001·21 cites·11 claims
- 2276US2026092359A1Film formation apparatus and film formation methodSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 2376US2026070094A1Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 2475US11387083B2Plasma processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Jul 12, 2022·2 cites·13 claims
- 2575US7679730B2Surface inspection apparatus and surface inspection method for strained silicon waferSHIBAURA MECHATRONICS CORP·Filed 2006·Granted Mar 16, 2010·5 cites·8 claims
- 2674US6363950B2Apparatus for processing substrate using process solutions having desired mixing ratiosSHIBAURA MECHATRONICS CORP·Filed 2001·Granted Apr 2, 2002·19 cites·9 claims
- 2772US9795999B2Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Oct 24, 2017·2 cites·10 claims
- 2871US10319602B2Substrate treatment method and substrate treatment apparatusSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Jun 11, 2019·2 cites·6 claims
- 2970US8023111B2Surface inspection apparatusSHIBAURA MECHATRONICS CORP·Filed 2008·Granted Sep 20, 2011·3 cites·6 claims
- 3070US7608562B2Method and apparatus for producing photocatalystSHIBAURA MECHATRONICS CORP·Filed 2008·Granted Oct 27, 2009·1 cites·12 claims
- 3170US7114245B2Component holding head, component mounting apparatus using same, and component mounting methodSHIBAURA MECHATRONICS CORP·Filed 2002·Granted Oct 3, 2006·15 cites·13 claims
- 3270US6851460B2Liquid crystal dropping apparatus and method, and liquid crystal display panel producing apparatusSHIBAURA MECHATRONICS CORP·Filed 2003·Granted Feb 8, 2005·17 cites·14 claims
- 3370US2026096387A1Substrate processing apparatus and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 3469US10734217B2Substrate treatment device and substrate treatment methodSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Aug 4, 2020·1 cites·6 claims
- 3569US10586727B2Suction stage, lamination device, and method for manufacturing laminated substrateSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Mar 10, 2020·3 cites·14 claims
- 3669US10244670B2Electronic component, electric component manufacturing apparatus, and electronic component manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Mar 26, 2019·1 cites·3 claims
- 3769US9972513B2Device and method for treating a substrate with hydrofluoric and nitric acidSHIBAURA MECHATRONICS CORP·Filed 2017·Granted May 15, 2018·1 cites·9 claims
- 3869US9607865B2Substrate processing device and substrate processing methodSHIBAURA MECHATRONICS CORP·Filed 2014·Granted Mar 28, 2017·2 cites·7 claims
- 3969US9513557B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Dec 6, 2016·1 cites·9 claims
- 4069US8999612B2Method for manufacturing reflective mask and apparatus for manufacturing reflective maskSHIBAURA MECHATRONICS CORP·Filed 2013·Granted Apr 7, 2015·1 cites·17 claims
- 4169US7367601B2Substrate transfer apparatus and substrate transfer methodSHIBAURA MECHATRONICS CORP·Filed 2001·Granted May 6, 2008·16 cites·9 claims
- 4268US10607863B2Substrate processing apparatusSHIBAURA MECHATRONICS CORP·Filed 2015·Granted Mar 31, 2020·1 cites·11 claims
- 4368US7935232B2Sputtering apparatus and method, and sputtering control programSHIBAURA MECHATRONICS CORP·Filed 2005·Granted May 3, 2011·3 cites·4 claims
- 4467US12365976B2Film forming apparatusSHIBAURA MECHATRONICS CORP·Filed 2024·Granted Jul 22, 2025·0 cites·11 claims
- 4567US7950434B2Adhesive tape adhering apparatusSHIBAURA MECHATRONICS CORP·Filed 2008·Granted May 31, 2011·2 cites·8 claims
- 4667US6189591B1Wafer sheet expanding apparatus and pellet bonding apparatus using thereofSHIBAURA MECHATRONICS CORP·Filed 1999·Granted Feb 20, 2001·38 cites·8 claims
- 4766US12385125B2Film formation apparatusSHIBAURA MECHATRONICS CORP·Filed 2023·Granted Aug 12, 2025·0 cites·12 claims
- 4866US12224250B2Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation methodSHIBAURA MECHATRONICS CORP·Filed 2023·Granted Feb 11, 2025·0 cites·15 claims
- 4966US2025226240A1Substrate treatment deviceSHIBAURA MECHATRONICS CORP·Filed 2025·Application pending·0 cites
- 5065US11609491B2Reflective mask cleaning apparatus and reflective mask cleaning methodSHIBAURA MECHATRONICS CORP·Filed 2019·Granted Mar 21, 2023·0 cites·4 claims
Showing the top 50 of 212 patent records by PatentIndex Score.
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