Inventor · disambiguated record
Adib Khan
Also filed as: KHAN ADIB · KHAN ADIB M
27 granted patents·7 pending applications·271 citations·filing 2010–2024
96Inventor score
Top patents by PatentIndex Score
34 records- 0197US10748783B2Gas delivery moduleAPPLIED MATERIALS INC·Filed 2019·Granted Aug 18, 2020·17 cites·20 claims
- 0297US10720341B2Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2018·Granted Jul 21, 2020·20 cites·9 claims
- 0397US10529603B2High pressure wafer processing systems and related methodsMICROMATERIALS LLC·Filed 2019·Granted Jan 7, 2020·20 cites·20 claims
- 0497US10224224B2High pressure wafer processing systems and related methodsMICROMATERIALS LLC·Filed 2017·Granted Mar 5, 2019·19 cites·24 claims
- 0597US10179941B1Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2017·Granted Jan 15, 2019·29 cites·18 claims
- 0696US10358715B2Integrated cluster tool for selective area depositionAPPLIED MATERIALS INC·Filed 2016·Granted Jul 23, 2019·15 cites·17 claims
- 0796US8894767B2Flow control features of CVD chambersCHUC KIEN N·Filed 2010·Granted Nov 25, 2014·107 cites·16 claims
- 0895US10704141B2In-situ CVD and ALD coating of chamber to control metal contaminationAPPLIED MATERIALS INC·Filed 2019·Granted Jul 7, 2020·7 cites·20 claims
- 0995US10675581B2Gas abatement apparatusAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·19 cites·14 claims
- 1091US11527421B2Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2020·Granted Dec 13, 2022·2 cites·17 claims
- 1189US10947621B2Low vapor pressure chemical deliveryAPPLIED MATERIALS INC·Filed 2018·Granted Mar 16, 2021·2 cites·20 claims
- 1286US10550472B2Flow control features of CVD chambersAPPLIED MATERIALS INC·Filed 2014·Granted Feb 4, 2020·2 cites·4 claims
- 1381US11066747B2Chemical delivery chamber for self-assembled monolayer processesAPPLIED MATERIALS INC·Filed 2017·Granted Jul 20, 2021·3 cites·14 claims
- 1479US11756803B2Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2022·Granted Sep 12, 2023·0 cites·20 claims
- 1577US12203171B2Batch curing chamber with gas distribution and individual pumpingAPPLIED MATERIALS INC·Filed 2022·Granted Jan 21, 2025·0 cites·9 claims
- 1677US10113236B2Batch curing chamber with gas distribution and individual pumpingAPPLIED MATERIALS INC·Filed 2014·Granted Oct 30, 2018·2 cites·20 claims
- 1777US9285168B2Module for ozone cure and post-cure moisture treatmentLUBOMIRSKY DMITRY·Filed 2011·Granted Mar 15, 2016·4 cites·13 claims
- 1874US12198951B2High pressure wafer processing systems and related methodsAPPLIED MATERIALS INC·Filed 2018·Granted Jan 14, 2025·1 cites·17 claims
- 1972US11749555B2Semiconductor processing systemAPPLIED MATERIALS INC·Filed 2019·Granted Sep 5, 2023·1 cites·15 claims
- 2070US12146219B2Flow control features of CVD chambersAPPLIED MATERIALS INC·Filed 2020·Granted Nov 19, 2024·0 cites·21 claims
- 2167US11361978B2Gas delivery moduleAPPLIED MATERIALS INC·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
- 2266US2025022694A1Heater plates with distributed purge channels, rf meshes and ground electrodesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2363US2025163607A1Low temperature epi chamberAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2462US11408075B2Batch curing chamber with gas distribution and individual pumpingAPPLIED MATERIALS INC·Filed 2018·Granted Aug 9, 2022·0 cites·10 claims
- 2560US2025051965A1Showerhead for fast delivery of incompatable precursorsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2659US11110383B2Gas abatement apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Sep 7, 2021·0 cites·23 claims
- 2757US11725274B2Integrated cluster tool for selective area depositionAPPLIED MATERIALS INC·Filed 2019·Granted Aug 15, 2023·0 cites·21 claims
- 2857US2025037974A1Chamber for substrate backside and bevel depositionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2955US11948828B2Pin-less substrate transfer apparatus and method for a processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Apr 2, 2024·0 cites·20 claims
- 3054US2019119769A1Gas delivery system for high pressure processing chamberMICROMATERIALS LLC·Filed 2018·Application pending·0 cites
- 3148USD941787SSubstrate transfer bladeAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·1 cites·1 claims
- 3244US2020035513A1Processing apparatusAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3340US8524004B2Loadlock batch ozone cureLUBOMIRSKY DMITRY·Filed 2011·Granted Sep 3, 2013·0 cites·10 claims
- 3438US2019051495A1Microwave Reactor For Deposition or Treatment of Carbon CompoundsLIANG QIWEI·Filed 2018·Application pending·0 cites
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