Assignee
MICROMATERIALS LLC
US30 patents
Top patents by PatentIndex Score
US10720341B2Jul 21, 2020
Gas delivery system for high pressure processing chamber
MICROMATERIALS LLC20 citations94
US10529603B2Jan 7, 2020
High pressure wafer processing systems and related methods
MICROMATERIALS LLC20 citations93
US10224224B2Mar 5, 2019
High pressure wafer processing systems and related methods
MICROMATERIALS LLC19 citations93
US10179941B1Jan 15, 2019
Gas delivery system for high pressure processing chamber
MICROMATERIALS LLC29 citations93
US11597989B2Mar 7, 2023
Apparatus and methods for depositing molten metal onto a foil substrate
MICROMATERIALS LLC5 citations85
US10510540B2Dec 17, 2019
Mask scheme for cut pattern flow with enlarged EPE window
MICROMATERIALS LLC11 citations84
US10424507B2Sep 24, 2019
Fully self-aligned via
MICROMATERIALS LLC5 citations83
US11049695B2Jun 29, 2021
Metal contact landing structure
MICROMATERIALS LLC8 citations82
US11527421B2Dec 13, 2022
Gas delivery system for high pressure processing chamber
MICROMATERIALS LLC2 citations73
US10692728B2Jun 23, 2020
Use of selective aluminum oxide etch
MICROMATERIALS LLC5 citations73
US10600688B2Mar 24, 2020
Methods of producing self-aligned vias
MICROMATERIALS LLC6 citations73
US10593594B2Mar 17, 2020
Selectively etched self-aligned via processes
MICROMATERIALS LLC2 citations73
US11597988B2Mar 7, 2023
Apparatus and methods for depositing molten metal onto a foil substrate
MICROMATERIALS LLC1 citations72
US11384419B2Jul 12, 2022
Apparatus and methods for depositing molten metal onto a foil substrate
MICROMATERIALS LLC1 citations72
US10892187B2Jan 12, 2021
Method for creating a fully self-aligned via
MICROMATERIALS LLC2 citations72
US10553485B2Feb 4, 2020
Methods of producing fully self-aligned vias and contacts
MICROMATERIALS LLC5 citations72
US10790191B2Sep 29, 2020
Selective removal process to create high aspect ratio fully self-aligned via
MICROMATERIALS LLC3 citations71
US11114333B2Sep 7, 2021
Method for depositing and reflow of a high quality etch resistant gapfill dielectric film
MICROMATERIALS LLC0 citations63
US11756803B2Sep 12, 2023
Gas delivery system for high pressure processing chamber
MICROMATERIALS LLC0 citations62
US11705366B2Jul 18, 2023
Methods for controllable metal and barrier-liner recess
MICROMATERIALS LLC0 citations62
US11062942B2Jul 13, 2021
Methods for controllable metal and barrier-liner recess
MICROMATERIALS LLC0 citations62
US10699953B2Jun 30, 2020
Method for creating a fully self-aligned via
MICROMATERIALS LLC1 citations62
US11037825B2Jun 15, 2021
Selective removal process to create high aspect ratio fully self-aligned via
MICROMATERIALS LLC0 citations61
US11437274B2Sep 6, 2022
Fully self-aligned via
MICROMATERIALS LLC1 citations59
US10410921B2Sep 10, 2019
Fully self-aligned via
MICROMATERIALS LLC0 citations52
US11164938B2Nov 2, 2021
DRAM capacitor module
MICROMATERIALS LLC0 citations51
US10522404B2Dec 31, 2019
Fully self-aligned via
MICROMATERIALS LLC0 citations51
US10892183B2Jan 12, 2021
Methods for removing metal oxides
MICROMATERIALS LLC0 citations50
US10573555B2Feb 25, 2020
Methods of producing self-aligned grown via
MICROMATERIALS LLC0 citations41
US10510602B2Dec 17, 2019
Methods of producing self-aligned vias
MICROMATERIALS LLC0 citations41