Inventor · disambiguated record
Hessel Sprey
Also filed as: SPREY HESSEL
15 granted patents·4 pending applications·1,402 citations·filing 1997–2022
94Inventor score
Top patents by PatentIndex Score
19 records- 0198US7419903B2Thin filmsASM INT·Filed 2005·Granted Sep 2, 2008·88 cites·17 claims
- 0297US6759325B2Sealing porous structuresASM MICROCHEMISTRY OY·Filed 2002·Granted Jul 6, 2004·169 cites·29 claims
- 0396US9552979B2Cyclic aluminum nitride deposition in a batch reactorASM IP HOLDING BV·Filed 2013·Granted Jan 24, 2017·43 cites·25 claims
- 0496US7498242B2Plasma pre-treating surfaces for atomic layer depositionASM INC·Filed 2006·Granted Mar 3, 2009·554 cites·46 claims
- 0594US6878628B2In situ reduction of copper oxide prior to silicon carbide depositionASM INTERNAT NV·Filed 2001·Granted Apr 12, 2005·159 cites·21 claims
- 0694US6387827B1Method for growing thin silicon oxides on a silicon substrate using chlorine precursorsIMEC VZW·Filed 1997·Granted May 14, 2002·348 cites·15 claims
- 0792US7981791B2Thin filmsASM INT·Filed 2008·Granted Jul 19, 2011·10 cites·11 claims
- 0889US11088002B2Substrate rack and a substrate processing system and methodASM IP HOLDING BV·Filed 2018·Granted Aug 10, 2021·7 cites·23 claims
- 0988US10056249B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2016·Granted Aug 21, 2018·4 cites·20 claims
- 1088US7884016B2Liner materials and related processes for 3-D integrationASM INT·Filed 2009·Granted Feb 8, 2011·13 cites·18 claims
- 1174US9006112B2Atomic layer deposition of antimony oxide filmsASM INT·Filed 2012·Granted Apr 14, 2015·2 cites·18 claims
- 1269US9514934B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2015·Granted Dec 6, 2016·1 cites·20 claims
- 1362US10699899B2Atomic layer deposition of antimony oxide filmsASM INT NV·Filed 2018·Granted Jun 30, 2020·0 cites·19 claims
- 1453US6884317B2Method and installation for etching a substrateASM INT·Filed 2001·Granted Apr 26, 2005·4 cites·19 claims
- 1550US2011256718A1Thin filmsASM INT·Filed 2011·Application pending·0 cites
- 1649US2022384197A1Method of depositing material and semiconductor devicesASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 1748US2009269939A1Cyclical oxidation processASM INT·Filed 2009·Application pending·0 cites
- 1845US2008242078A1Process of filling deep vias for 3-d integration of substratesASM NUTOOL INC·Filed 2007·Application pending·0 cites
- 1942US8652573B2Method of CVD-depositing a film having a substantially uniform film thicknessSTOKHOF MAARTEN·Filed 2011·Granted Feb 18, 2014·0 cites·27 claims
Join the waitlist — get patent alerts
Get an alert when Hessel Sprey files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →