Assignee
ASM INTERNAT NV
NL·14 granted patents·1 pending application·4,257 citations·filing 1999–2008
Top patents by PatentIndex Score
15 records- 0199US6780704B1Conformal thin films over textured capacitor electrodesASM INTERNAT NV·Filed 1999·Granted Aug 24, 2004·609 cites·38 claims
- 0298US6921712B2Process for producing integrated circuits including reduction using gaseous organic compoundsASM INTERNAT NV·Filed 2001·Granted Jul 26, 2005·153 cites·30 claims
- 0397US6767582B1Method of modifying source chemicals in an ald processASM INTERNAT NV·Filed 2000·Granted Jul 27, 2004·129 cites·22 claims
- 0496US6985788B2Method and system to process semiconductor wafersASM INTERNAT NV·Filed 2004·Granted Jan 10, 2006·473 cites·9 claims
- 0596US6981832B2Wafer handling systemASM INTERNAT NV·Filed 2003·Granted Jan 3, 2006·497 cites·21 claims
- 0696US6732006B2Method and system to process semiconductor wafersASM INTERNAT NV·Filed 2002·Granted May 4, 2004·491 cites·79 claims
- 0795US6936535B2Copper interconnect structure having stuffed diffusion barrierASM INTERNAT NV·Filed 2001·Granted Aug 30, 2005·80 cites·19 claims
- 0894US6878628B2In situ reduction of copper oxide prior to silicon carbide depositionASM INTERNAT NV·Filed 2001·Granted Apr 12, 2005·159 cites·21 claims
- 0994US6794287B2Process for growing metal or metal carbide thin films utilizing boron-containing reducing agentsASM INTERNAT NV·Filed 2003·Granted Sep 21, 2004·81 cites·15 claims
- 1092US7085623B2Method and system for using short ranged wireless enabled computers as a service toolASM INTERNAT NV·Filed 2002·Granted Aug 1, 2006·599 cites·17 claims
- 1190US7356762B2Method for the automatic generation of an interactive electronic equipment documentation packageASM INTERNAT NV·Filed 2002·Granted Apr 8, 2008·480 cites·40 claims
- 1290US6975921B2Graphical representation of a wafer processing processASM INTERNAT NV·Filed 2001·Granted Dec 13, 2005·468 cites·38 claims
- 1374US6884465B2Process for producing aluminum oxide films at low temperaturesASM INTERNAT NV·Filed 2004·Granted Apr 26, 2005·18 cites·25 claims
- 1472US6843201B2Temperature control for single substrate semiconductor processing reactorASM INTERNAT NV·Filed 2002·Granted Jan 18, 2005·20 cites·50 claims
- 1534US2009325391A1Ozone and teos process for silicon oxide depositionASM INTERNAT NV·Filed 2008·Application pending·0 cites
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