Inventor · disambiguated record
Rainer Knippelmeyer
Also filed as: KNIPPELMEYER RAINER · KNIPPELMEYER RAINER K
38 granted patents·2 pending applications·700 citations·filing 2002–2020
98Inventor score
Files withZEISS CARL MICROSCOPY GMBH11KLA TENCOR CORP8ZEISS CARL NTS GMBH8KNIPPELMEYER RAINER6APPLIED MATERIALS ISRAEL1
Top patents by PatentIndex Score
40 records- 0198US10622184B2Objective lens arrangement usable in particle-optical systemsZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Apr 14, 2020·29 cites·16 claims
- 0298US10541112B2Charged particle beam system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2018·Granted Jan 21, 2020·28 cites·34 claims
- 0398US10354831B2Charged particle inspection method and charged particle systemZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Jul 16, 2019·30 cites·6 claims
- 0497US7244949B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsAPPLIED MATERIALS ISRAEL·Filed 2006·Granted Jul 17, 2007·210 cites·24 claims
- 0596US9336981B2Charged particle detection system and multi-beamlet inspection systemKNIPPELMEYER RAINER·Filed 2011·Granted May 10, 2016·33 cites·15 claims
- 0696US9263233B2Charged particle multi-beam inspection system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Feb 16, 2016·39 cites·5 claims
- 0796US9224576B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Dec 29, 2015·18 cites·10 claims
- 0896US7554094B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsCARL ZEISS SMT A G·Filed 2007·Granted Jun 30, 2009·29 cites·23 claims
- 0995US9099282B2Focusing a charged particle imaging systemAPPLIED MATERIALS ISRAEL LTD·Filed 2014·Granted Aug 4, 2015·19 cites·38 claims
- 1094US9673024B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jun 6, 2017·9 cites·15 claims
- 1194US9530613B2Focusing a charged particle systemROGERS STEVEN R·Filed 2012·Granted Dec 27, 2016·36 cites·20 claims
- 1294US8039813B2Charged particle-optical systems, methods and componentsZEISS CARL SMT GMBH·Filed 2006·Granted Oct 18, 2011·32 cites·57 claims
- 1393US8637834B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2011·Granted Jan 28, 2014·17 cites·21 claims
- 1493US8097847B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsKNIPPELMEYER RAINER·Filed 2009·Granted Jan 17, 2012·16 cites·12 claims
- 1591US9324537B2Charged particle inspection method and charged particle systemZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Apr 26, 2016·8 cites·16 claims
- 1689US10504681B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Dec 10, 2019·3 cites·14 claims
- 1788US10643819B2Method and system for charged particle microscopy with improved image beam stabilization and interrogationKLA TENCOR CORP·Filed 2016·Granted May 5, 2020·6 cites·28 claims
- 1886US10192716B2Multi-beam dark field imagingKLA TENCOR CORP·Filed 2016·Granted Jan 29, 2019·4 cites·21 claims
- 1985US10325753B2Method and system for focus adjustment of a multi-beam scanning electron microscopy systemKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·14 claims
- 2082US6878936B2Applications operating with beams of charged particlesZEISS CARL NTS GMBH·Filed 2003·Granted Apr 12, 2005·17 cites·40 claims
- 2181US7084406B2Detector arrangement and detection methodZEISS CARL NTS GMBH·Filed 2002·Granted Aug 1, 2006·16 cites·50 claims
- 2281US6891168B2Particle-optical apparatus and method for operating the sameZEISS CARL NTS GMBH·Filed 2003·Granted May 10, 2005·16 cites·30 claims
- 2380US10121635B2Charged particle beam system and method of operating the sameZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Nov 6, 2018·3 cites·22 claims
- 2478US6903337B2Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the sameZEISS CARL SMT AG·Filed 2002·Granted Jun 7, 2005·15 cites·34 claims
- 2577US6946657B2Electron microscopy systemZEISS CARL NTS GMBH·Filed 2003·Granted Sep 20, 2005·13 cites·20 claims
- 2675US6967328B2Method for the electron-microscopic observation of a semiconductor arrangement and apparatus thereforZEISS CARL NTS GMBH·Filed 2003·Granted Nov 22, 2005·18 cites·21 claims
- 2773US11527379B2Objective lens arrangement usable in particle-optical systemsZEISS CARL MICROSCOPY GMBH·Filed 2020·Granted Dec 13, 2022·0 cites·22 claims
- 2873US7135677B2Beam guiding arrangement, imaging method, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Nov 14, 2006·11 cites·44 claims
- 2972US6914249B2Particle-optical apparatus, electron microscopy system and electron lithography systemZEISS CARL NTS GMBH·Filed 2003·Granted Jul 5, 2005·9 cites·21 claims
- 3070US7105814B2Electron microscopy system and electron microscopy methodZEISS CARL NTS GMBH·Filed 2003·Granted Sep 12, 2006·8 cites·18 claims
- 3169US10460905B2Backscattered electrons (BSE) imaging using multi-beam toolsKLA TENCOR CORP·Filed 2016·Granted Oct 29, 2019·1 cites·22 claims
- 3268US10366862B2Method and system for noise mitigation in a multi-beam scanning electron microscopy systemKLA TENCOR CORP·Filed 2016·Granted Jul 30, 2019·1 cites·9 claims
- 3365US8334701B2Repairing defectsKNIPPELMEYER RAINER·Filed 2009·Granted Dec 18, 2012·2 cites·24 claims
- 3458US2009159810A1Particle-Optical ComponentKNIPPELMEYER RAINER·Filed 2006·Application pending·0 cites
- 3558US2016181054A1Objective lens arrangement usable in particle-optical systemsZEISS CARL MICROSCOPY GMBH·Filed 2016·Application pending·0 cites
- 3657US11120969B2Method and system for charged particle microscopy with improved image beam stabilization and interrogationKLA TENCOR CORP·Filed 2020·Granted Sep 14, 2021·0 cites·18 claims
- 3747US8907277B2Reducing particle implantationKNIPPELMEYER RAINER·Filed 2009·Granted Dec 9, 2014·0 cites·25 claims
- 3846US8384029B2Cross-section systems and methodsZEISS CARL NTS LLC·Filed 2009·Granted Feb 26, 2013·0 cites·14 claims
- 3945US10861671B2Method and system for focus adjustment of a multi-beam scanning electron microscopy systemKLA TENCOR CORP·Filed 2019·Granted Dec 8, 2020·0 cites·20 claims
- 4037US11302511B2Field curvature correction for multi-beam inspection systemsKLA TENCOR CORP·Filed 2016·Granted Apr 12, 2022·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →