Assignee

APPLIED MATERIALS ISRAEL

DE·1 granted patent·210 citations·filing 2006–2006

Technology mixB82Y1 H01J1 H10P1

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0197US7244949B2Particle-optical systems and arrangements and particle-optical components for such systems and arrangementsAPPLIED MATERIALS ISRAEL·Filed 2006·Granted Jul 17, 2007·210 cites·24 claims

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