Inventor · disambiguated record
Mark V. Smith
Also filed as: SMITH MARK · SMITH MARK V · SMITH MARK VINCENT
37 granted patents·19 pending applications·520 citations·filing 1992–2024
98Inventor score
Top patents by PatentIndex Score
56 records- 0195US9054144B2Porous barrier for evenly distributed purge gas in a microenvironmentBURNS JOHN·Filed 2010·Granted Jun 9, 2015·22 cites·7 claims
- 0293US11901205B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2023·Granted Feb 13, 2024·2 cites·9 claims
- 0393US7900776B2Wafer container with door actuated wafer restraintENTEGRIS INC·Filed 2006·Granted Mar 8, 2011·21 cites·14 claims
- 0492US7523830B2Wafer container with secondary wafer restraint systemENTEGRIS INC·Filed 2005·Granted Apr 28, 2009·21 cites·20 claims
- 0592US6187182B1Filter cartridge assembly for a gas purging systemSEMIFAB INC·Filed 1998·Granted Feb 13, 2001·80 cites·9 claims
- 0691US7866480B2Front opening substrate container with bottom plateENTEGRIS INC·Filed 2007·Granted Jan 11, 2011·16 cites·20 claims
- 0791US7857683B2CMP retaining ringENTEGRIS INC·Filed 2009·Granted Dec 28, 2010·14 cites·20 claims
- 0891US7677393B2Wafer container and door with vibration dampening latching mechanismENTEGRIS INC·Filed 2007·Granted Mar 16, 2010·16 cites·27 claims
- 0991US7422107B2Kinematic coupling with textured contact surfacesENTEGRIS INC·Filed 2006·Granted Sep 9, 2008·17 cites·16 claims
- 1089US11551957B2Purge connectors and modules for a substrate containerENTEGRIS INC·Filed 2020·Granted Jan 10, 2023·2 cites·20 claims
- 1189US8783463B2Wafer container with tubular environmental control componentsWATSON JAMES A·Filed 2009·Granted Jul 22, 2014·20 cites·28 claims
- 1287US11610795B2Membrane diffuser for a substrate containerENTEGRIS INC·Filed 2019·Granted Mar 21, 2023·4 cites·19 claims
- 1387US9997388B2Substrate container with purge portsENTEGRIS INC·Filed 2013·Granted Jun 12, 2018·8 cites·20 claims
- 1486US6513654B2SMIF container including an electrostatic dissipative reticle support structureASYST TECHNOLOGIES·Filed 2001·Granted Feb 4, 2003·37 cites·15 claims
- 1585US7182203B2Wafer container and door with vibration dampening latching mechanismENTEGRIS INC·Filed 2004·Granted Feb 27, 2007·29 cites·9 claims
- 1682US11398395B2Substrate container with latching mechanism having two cam profilesENTEGRIS INC·Filed 2017·Granted Jul 26, 2022·5 cites·20 claims
- 1782US10347517B2Towers for substrate carriersENTEGRIS INC·Filed 2014·Granted Jul 9, 2019·7 cites·8 claims
- 1882US7201276B2Front opening substrate container with bottom plateENTEGRIS INC·Filed 2004·Granted Apr 10, 2007·24 cites·19 claims
- 1981US7347329B2Substrate carrierENTEGRIS INC·Filed 2004·Granted Mar 25, 2008·25 cites·14 claims
- 2081US7100772B2Wafer container with door actuated wafer restraintENTEGRIS INC·Filed 2004·Granted Sep 5, 2006·22 cites·18 claims
- 2179US7073667B2Photochromic substrate containerENTEGRIS INC·Filed 2004·Granted Jul 11, 2006·19 cites·23 claims
- 2276US10032660B2Porous barrier for evenly distributed purge gas in a microenvironmentENTEGRIS INC·Filed 2015·Granted Jul 24, 2018·2 cites·10 claims
- 2373US10043696B2Wafer container with tubular environmental control componentsENTEGRIS INC·Filed 2014·Granted Aug 7, 2018·2 cites·12 claims
- 2473US7316325B2Substrate containerENTEGRIS INC·Filed 2004·Granted Jan 8, 2008·15 cites·11 claims
- 2570US2023377925A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2023·Application pending·0 cites
- 2669US6960654B2Method of forming glycosidic bonds from thioglycosides using an N,N-dialkylsulfinamideUNIV ILLINOIS·Filed 2003·Granted Nov 1, 2005·3 cites·19 claims
- 2767USD673853SSubstrate shipper componentENTEGRIS INC·Filed 2012·Granted Jan 8, 2013·12 cites·1 claims
- 2867US2023128154A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2022·Application pending·0 cites
- 2964US7325693B2Wafer container and door with cam latching mechanismENTEGRIS INC·Filed 2004·Granted Feb 5, 2008·9 cites·22 claims
- 3064US2025029815A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3163US12315749B2Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying containerENTEGRIS INC·Filed 2022·Granted May 27, 2025·0 cites·19 claims
- 3263US11869787B2Substrate container valve assembliesENTEGRIS INC·Filed 2020·Granted Jan 9, 2024·0 cites·5 claims
- 3363US2025029858A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3463US2025029857A1Module retainerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3563US2025029856A1Method and device for front gas delivery into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3662US2024363380A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3762US2024412995A1Guided diffusion device brackets and methods for diffusion device retentionENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3862US2024412994A1Substrate container, and door locking mechanism thereofENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3961US5911887AMethod of etching a bond padCYPRESS SEMICONDUCTOR CORP·Filed 1996·Granted Jun 15, 1999·29 cites·17 claims
- 4060US7344030B2Wafer carrier with apertured door for cleaningENTEGRIS INC·Filed 2004·Granted Mar 18, 2008·7 cites·21 claims
- 4158US2023411191A1Purging gas amplifierENTEGRIS INC·Filed 2023·Application pending·0 cites
- 4258US2024274454A1Substrate container systems and methods of purging a substrate containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4358US2024222172A1Substrate container with purge gas diffuserENTEGRIS INC·Filed 2023·Application pending·0 cites
- 4454US2023245908A1Substrate container with mechanically actuated exhaust valveENTEGRIS INC·Filed 2023·Application pending·0 cites
- 4554US2023131451A1Method and device to regulate purge into a containerENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4653US6536813B2SMIF container latch mechanismASYST TECHNOLOGIES·Filed 2001·Granted Mar 25, 2003·4 cites·22 claims
- 4751USD664851SSubstrate shipper componentBURNS JOHN·Filed 2010·Granted Aug 7, 2012·6 cites·1 claims
- 4851US2007224864A1CMP retaining ringBURNS JOHN·Filed 2006·Application pending·0 cites
- 4949US12255084B2Handle for wafer carrierENTEGRIS INC·Filed 2020·Granted Mar 18, 2025·0 cites·16 claims
- 5049US2011151755A1Cmp retaining ringENTEGRIS INC·Filed 2010·Application pending·0 cites
Showing the top 50 of 56 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →