Substrate container with mechanically actuated exhaust valve

Abstract

A system is provided. The system includes a substrate container having at least two purge modules. Each purge module of the at least two purge modules includes a flow control device. The flow control device of each purge module is configured to be actuated for egress of a purge fluid. A method of actuating flow control devices of purge modules of a substrate container is provided. The method includes starting a purge process of the substrate container; streaming a purge fluid into an interior of the substrate container, the substrate container having at least two purge modules, each purge module of the at least two purge modules including a flow control device, the flow control device of each purge module being configured to be actuated for egress of the purge fluid; and actuating the flow control device for egress of the purge fluid.

What is claimed is: 
     
         1 . A system, comprising:
 a substrate container having at least two purge modules,   wherein each purge module of the at least two purge modules includes a flow control device,   the flow control device of each purge module is configured to be actuated for egress of a purge fluid.   
     
     
         2 . The system according to  claim 1 , wherein the substrate container is a front opening unified pod (FOUP). 
     
     
         3 . The system according to  claim 1 , further comprising:
 a controller configured to actuate the flow control device.   
     
     
         4 . The system according to  claim 3 , wherein the controller is configured to actuate the flow control device during a close-door purge process. 
     
     
         5 . The system according to  claim 3 , further comprising:
 at least one sensor,   wherein the at least one sensor is configured to sense at least one parameter, and   the controller is configured to actuate the flow control device based on the sensed at least one parameter.   
     
     
         6 . The system according to  claim 5 , wherein the at least one sensor is a pressure sensor configured to sense an internal pressure of the substrate container. 
     
     
         7 . The system according to  claim 3 , wherein the flow control device is actuated via an actuating mechanism, the actuating mechanism is controlled by the controller. 
     
     
         8 . The system according to  claim 7 , wherein the actuating mechanism includes a solenoid controlling an actuator to actuate the flow control device. 
     
     
         9 . The system according to  claim 1 , wherein the flow control device is a check valve, the check valve is oriented so that the check valve is opened by pressure or force from outside of the substrate container. 
     
     
         10 . The system according to  claim 1 , wherein a cracking pressure of the flow control device is greater than a cracking pressure of a door-seal of the substrate container. 
     
     
         11 . The system according to  claim 1 , wherein the at least two purge modules include four purge modules, the system further includes a controller, 
 the controller is configured to selectively actuate a combination of flow control devices of the four purge modules to maintain a desired purge of the purge fluid flow inside the substrate container.   
     
     
         12 . The system according to  claim 1 , wherein the system further includes a controller, 
 during a close-door purge process, the controller is configured to actuate the flow control device based on a sensed internal pressure of the substrate container.   
     
     
         13 . The system according to  claim 12 , wherein during the close-door purge process, the controller is configured to maintain an internal pressure of the substrate container below a cracking pressure of a door-seal of the substrate container. 
     
     
         14 . The system according to  claim 1 , wherein the system further includes a controller, 
 during a close-door purge process, the controller is configured to actuate the flow control device based on timing.   
     
     
         15 . The system according to  claim 1 , wherein the system further includes a controller, 
 during a close-door purge process, the controller is configured to actuate the flow control device based on a sensed internal relative humidity of the substrate container.   
     
     
         16 . The system according to  claim 1 , wherein the system further includes a controller, 
 during a close-door purge process, the controller is configured to actuate the flow control device based on a sensed internal oxygen level of the substrate container.   
     
     
         17 . The system according to  claim 1 , wherein the system further includes a controller, 
 during a close-door purge process, the controller is configured to actuate the flow control device based on a sensed presence of one or more volatile organic compounds inside the substrate container.   
     
     
         18 . The system according to  claim 1 , wherein each purge module of the at least two purge modules includes a particle filter or a vent. 
     
     
         19 . The system according to  claim 1 , further comprising:
 a pressure relief valve,   wherein the pressure relief valve is configured to open when a system pressure is at or above a threshold.   
     
     
         20 . A method of actuating flow control devices of purge modules of a substrate container, comprising:
 starting a purge process of the substrate container;   streaming a purge fluid into an interior of the substrate container, the substrate container having at least two purge modules, each purge module of the at least two purge modules including a flow control device, the flow control device of each purge module being configured to be actuated for egress of the purge fluid; and   actuating the flow control device for egress of the purge fluid.