Purge flow distribution system for a substrate container and method for performing the same

Abstract

A substrate container includes a shell defining an interior space and a purge flow distribution system. The shell includes a front opening, a bottom wall, and a rear wall. The purge flow distribution system receives a stream of purge gas and includes an inlet and a network of separate gas distributing devices configured to distribute the stream of purge gas into the interior space. A supply line is also included that is connected to the inlet and configured to divide the supply of purge gas to the network of separate gas distributing devices. A method of purging an open substrate container includes supplying a stream of purge gas to an inlet of a purge flow distribution system and dividing the purge gas to supply a network of separate gas distributing devices to distribute the stream of purge gas into the interior space.

1 - 20 . (canceled) 
     
     
         21 . A substrate container, comprising:
 a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, and a bottom wall including a front edge extending between the first side wall and the second side wall along the front opening of the shell;   a purge flow distribution system positioned on the shell, the purge flow distribution system configured to receive a stream of purge gas, wherein the purge flow distribution system includes an inlet configured to receive the stream of purge gas; and   at least one gas distributing device for distributing the stream of purge gas into the interior space.   
     
     
         22 . The substrate container according to  claim 21 , wherein the gas distributing device is a diffuser, manifold, membrane, side portions of the shell having slits or nozzles, a porous material, or a combination of at least two selected from the foregoing. 
     
     
         23 . The substrate container according to  claim 21 , wherein the at least one gas distributing device further comprises a network of gas distributing devices. 
     
     
         24 . The substrate container according to  claim 23 , wherein the one of the network of gas distributing devices is a first gas distributing device provided nearer the rear wall and another of the network of gas distributing devices is a second gas distributing device provided in the interior space of the substrate container, and wherein a first flow path is configured to supply a portion of the stream of purge gas to the first gas distributing device and a second flow path is configured to supply another portion of the stream of purge gas to the second gas distributing device. 
     
     
         25 . The substrate container according to  claim 24 , wherein the first flow path to the first gas distributing device has a smaller or larger cross-sectional area than the second flow path to the second gas distributing device or comprises an orifice, a spring loaded diverter, or valve to induce flow to the second flow path to the second gas distributing device. 
     
     
         26 . The substrate container according to  claim 21 , wherein the at least one gas distributing device comprises a gas distributing surface that comprises a plurality of openings arranged along a length of the gas distributing surface. 
     
     
         27 . The substrate container according to  claim 21 , wherein the purge flow distribution system further comprises a manifold base provided on the bottom wall and positioned on an exterior of the shell, the manifold base receives the stream of purge gas. 
     
     
         28 . The substrate container according to  claim 27 , wherein the manifold base is configured to divide the stream of purge gas into at least a left side flow path and a right side flow path to supply the portion of the stream of purge gas to two or more gas distributing devices. 
     
     
         29 . The substrate container according to  claim 21 , wherein the at least one gas distributing device comprises a gas distributing surface having porous material. 
     
     
         30 . The substrate container of  claim 21 , wherein the purge flow distribution system is attached to an inlet purge port in the bottom wall of the shell. 
     
     
         31 . The substrate container of  claim 21 , further comprising:
 an outlet port for discharging gas from the interior space, the outlet port being disposed in the bottom wall between the inlet and the second side wall.   
     
     
         32 . The substrate container of  claim 21 , wherein
 the bottom wall includes a rear inlet port for introducing a stream of purge gas into the interior space from the purge flow distribution system, the rear inlet port being disposed nearer the rear wall than the front opening.   
     
     
         33 . The substrate container of  claim 32 , wherein
 the bottom wall includes a second inlet port for introducing a second stream of purge gas into the interior space from the purge flow distribution system, the second inlet port being disposed nearer the front opening than the rear wall.   
     
     
         34 . The substrate container of  claim 21 , further comprising:
 a door configured to be received within the front opening defined by the shell to enclose the interior space.   
     
     
         35 . A substrate container, comprising:
 a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, and a bottom wall including a front edge extending between the first side wall and the second side wall along the front opening of the shell;   a manifold base positioned on the shell, the manifold base having an inlet configured to receive a stream of purge gas, and   at least one diffuser in communication with the manifold base for distributing the stream of purge gas into the interior space of the shell.   
     
     
         36 . The substrate container of  claim 35 , wherein the manifold base is positioned between the shell and a carrier plate. 
     
     
         37 . The substrate container of  claim 35 , wherein the at least one diffuser is positioned near the rear wall of the shell. 
     
     
         38 . The substrate container according to  claim 35 , wherein the diffuser comprises a gas distributing surface having porous material.