Inventor · disambiguated record
Wayne G. Renken
Also filed as: RENKEN WAYNE · RENKEN WAYNE G · RENKEN WAYNE GLENN
26 granted patents·3 pending applications·1,758 citations·filing 1983–2012
98Inventor score
Top patents by PatentIndex Score
29 records- 0198US4542650AThermal mass flow meterINNOVUS·Filed 1983·Granted Sep 24, 1985·141 cites·20 claims
- 0296US8046193B2Determining process condition in substrate processing moduleKLA TENCOR CORP·Filed 2008·Granted Oct 25, 2011·473 cites·11 claims
- 0396US8033190B2Process condition sensing wafer and data analysis systemKLA TENCOR TECH CORP·Filed 2010·Granted Oct 11, 2011·22 cites·15 claims
- 0496US4690371AElectromagnetic valve with permanent magnet armatureINNOVUS·Filed 1985·Granted Sep 1, 1987·186 cites·13 claims
- 0593US7855549B2Integrated process condition sensing wafer and data analysis systemKLA TENCOR CORP·Filed 2006·Granted Dec 21, 2010·23 cites·4 claims
- 0693US7135852B2Integrated process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2004·Granted Nov 14, 2006·79 cites·31 claims
- 0792US6889568B2Process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2002·Granted May 10, 2005·44 cites·33 claims
- 0892US6190040B1Apparatus for sensing temperature on a substrate in an integrated circuit fabrication toolSENSARRAY CORP·Filed 1999·Granted Feb 20, 2001·132 cites·33 claims
- 0991US7819033B2Process condition sensing wafer and data analysis systemRENKEN WAYNE G·Filed 2008·Granted Oct 26, 2010·14 cites·15 claims
- 1090US7757574B2Process condition sensing wafer and data analysis systemKLA TENCOR CORP·Filed 2005·Granted Jul 20, 2010·13 cites·11 claims
- 1190US7151366B2Integrated process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2003·Granted Dec 19, 2006·54 cites·25 claims
- 1289US6325536B1Integrated wafer temperature sensorsSENSARRAY CORP·Filed 1998·Granted Dec 4, 2001·108 cites·41 claims
- 1389US4685331AThermal mass flowmeter and controllerINNOVUS·Filed 1985·Granted Aug 11, 1987·76 cites·3 claims
- 1488US6616332B1Optical techniques for measuring parameters such as temperature across a surfaceSENSARRAY CORP·Filed 1999·Granted Sep 9, 2003·106 cites·19 claims
- 1587US7149643B2Integrated process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2005·Granted Dec 12, 2006·15 cites·12 claims
- 1686US5967661ATemperature calibration substrateSENSARRAY CORP·Filed 1997·Granted Oct 19, 1999·75 cites·23 claims
- 1785US8104342B2Process condition measuring deviceSUN MEI H·Filed 2008·Granted Jan 31, 2012·16 cites·37 claims
- 1884US5746513ATemperature calibration substrateSENSARRAY CORP·Filed 1997·Granted May 5, 1998·69 cites·32 claims
- 1983US7363195B2Methods of configuring a sensor networkSENSARRAY CORP·Filed 2005·Granted Apr 22, 2008·14 cites·5 claims
- 2080US7698952B2Pressure sensing deviceKLA TENCOR CORP·Filed 2007·Granted Apr 20, 2010·13 cites·25 claims
- 2180US7360463B2Process condition sensing wafer and data analysis systemSENSARRAY CORP·Filed 2003·Granted Apr 22, 2008·16 cites·31 claims
- 2274US7497134B2Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization processKLA TENCOR CORP·Filed 2007·Granted Mar 3, 2009·10 cites·21 claims
- 2373US7156924B2System and method for heating and cooling wafer at accelerated ratesSENSARRAY CORP·Filed 2003·Granted Jan 2, 2007·13 cites·29 claims
- 2471US6915589B2Sensor positioning systems and methodsSENSARRAY CORP·Filed 2003·Granted Jul 12, 2005·16 cites·27 claims
- 2567US9165846B2Process condition sensing wafer and data analysis systemRENKEN WAYNE G·Filed 2010·Granted Oct 20, 2015·1 cites·8 claims
- 2665US4647133AElectrical interconnect systemINNOVUS·Filed 1985·Granted Mar 3, 1987·29 cites·13 claims
- 2746US2013029433A1Process condition measuring deviceKLA TENCOR CORP·Filed 2012·Application pending·0 cites
- 2841US2003173346A1System and method for heating and cooling wafer at accelerated ratesFiled 2002·Application pending·0 cites
- 2939US2007113652A1Wireless Position Sensing WaferRENKEN WAYNE G·Filed 2006·Application pending·0 cites
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